FePd alloy films of 1 to 500 nm thicknesses are prepared on MgO(001) single-crystal substrates by employing a two-step method consisting of low-temperature deposition at 200 °C followed by high-temperature annealing at 600 °C. The influences of film thickness on the crystallographic orientation, the degree of L1 0 ordering, the magnetic property, and the surface roughness are systematically investigated. FePd(001) single-crystal films with disordered structure grow epitaxially on the substrates at 200 °C. The in-plane lattice is expanded to accommodate the lattice misfit between film and substrate (-9%). The distortion is decreased with increasing the thickness. When the films are annealed at 600 °C, transformation to L1 0 phase occurs. The films thinner than 40 nm consist of L1 0 (001) variant with the c-axis normal to the substrate surface, where the transformation along the perpendicular direction is preferentially taking place. On the contrary, the films thicker than 100 nm involve L1 0 (100) and L1 0 (010) variants whose c-axes are lying in the film plane and rotated around the film normal by 90° each other. The volume ratio of L1 0 (001) variant decreases to 0.22, as the thickness increases up to 500 nm. The order degrees of films thinner than 40 nm are 0.6-0.7. With further increasing the thickness, the order degree decreases. The lattice deformation in disordered FePd film before annealing is effective in enhancing L1 0 ordering and aligning the c-axis perpendicular to the substrate surface. The easy magnetization direction varies from perpendicular to in-plane, as the thickness increases from 100 to 500 nm. The magnetic anisotropy is affected by the crystal orientation and the order degree. The films thinner than 2 nm have island-like surfaces, where condensation of deposited atoms on substrate is taking place during the annealing process. When the thickness is increased beyond 10 nm, flat surface is kept before and after annealing.Index Terms-c-axis orientation, FePd alloy single-crystal film, L1 0 structure, order degree, surface morphology.