2004
DOI: 10.1016/j.susc.2004.05.097
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Formation of Ge nanoclusters on Si(111)-7×7 surface at high temperature

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Cited by 13 publications
(6 citation statements)
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“…Growth of Ge on Si surfaces has recently attracted much attention because of its importance both for semiconductor technology and for understanding scientific problems of growth (see, for example, [8,9]. Studies of Ge transport on Si surfaces could be important in solving of these problems.…”
Section: Introductionmentioning
confidence: 99%
“…Growth of Ge on Si surfaces has recently attracted much attention because of its importance both for semiconductor technology and for understanding scientific problems of growth (see, for example, [8,9]. Studies of Ge transport on Si surfaces could be important in solving of these problems.…”
Section: Introductionmentioning
confidence: 99%
“…To facilitate the formation of ordered Ge-based nanostructures on the Si(111)-7×7 surface, the substrate should be kept at temperature ranging from 100 to 300 ∘ C during deposition, since at temperatures lower than 100 ∘ C the physically deposited Ge atoms do not have enough mobility to span the dimer wall after arriving on the surface. [46][47][48] , are also shown. [49] With increasing coverage, isolated Ge nanoparticles with varying geometric configurations appear on the Si(111)-7×7 surface as shown in Fig.…”
Section: Ge/si(111)-7×7mentioning
confidence: 99%
“…5(c) and 5(d). [46,50] The intermixing of Ge/Si plays an important role in the epitaxial growth of these Ge islands. [55] 0.07 of the 2D nanostructure formed on Si (111) with a Ge coverage of 0.30 ML after annealing at 300 ∘ C. [52] Inset: the height profile along the dashed line indicated in (a).…”
Section: -3mentioning
confidence: 99%
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“…Then Germanium (99.9999% purity) was deposited onto the as-prepared Si(111)-7 × 7 surface by resistive evaporation. The substrate was kept above room temperature (ranging from 100 to 300 • C) to facilitate the formation of ordered structures since at room temperature, Ge atoms do not have enough mobility to span the dimer wall after arriving on the Si(111)-7 × 7 surface [59,61,68]. During evaporation, the system pressure was better than 5 × 10 −10 mbar.…”
Section: Journal Of Nanomaterialsmentioning
confidence: 99%