“…The crystallites produced by the combination of DC CVD and selective oxidation have perfect pyramidal shapes and a radius of curvature at their apex in the range of a few to a hundred nanometers. The effects of the DC CVD process parameters on the shape and properties of the needles were investigated [ 11 , 12 , 13 , 14 , 15 ], as well as the ability for the controllable creation of luminescent color centers, such as silicon-vacancy (SiV), nitrogen-vacancy (NV), and germanium-vacancy (GeV) color centers, during the single-step growth process. One of the limiting factors of the DC gas discharge-based technology is the necessity for conductive substrates for the film deposition.…”