Formation of High Aspect Ratio Microcoil Using Dipping Method

Noda, Daiji; Yamashita, Shuhei; Matsumoto, Yoshihisa; Setomoto, Masaru; Hattori, Tadashi

doi:10.1299/jamdsm.2.174

Cited by 3 publications

(3 citation statements)

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“…To prepare a PMMA solution, a PMMA sheet was crushed and dissolved in 2-ethoxyethyl acetate for more than 15 hours (Yamashita et al 2006). A highly viscous photoresist solution and control over the centrifugal force are important factors to obtain a thick uniform coating, and thus enable the production of high aspect ratio coil line structures (Noda et al 2008b).…”

Section: Dipping Methodsmentioning

confidence: 99%

“…First, we have calculated coil performance with high aspect ratio coil lines. Figure 19 shows calculation results of quality factor (Q factor) and resistance for different aspect ratio structures (Noda et al 2008b). Here, we used coil parameters as coil turns of 20 and coil line width of 10 μm.…”

Section: Development Of Microcoilmentioning

confidence: 99%

“…However, metal bar was not directly exposed. Then, we applied a PMMA on a master metal bar using dipping method (Noda et al 2008b;Yamashita et al 2006& Noda et al 2008c. The thickness of PMMA was determined as coil line depth.…”

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confidence: 99%

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Fabrication of high aspect ratio microcoils for electromagnetic actuators

Noda

Setomoto

Hattori

2009

2009 International Symposium on Micro-NanoMechatronics and Human Science

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Actuators are finding increasing use in the various fields and many applications. Therefore, it is one of the most important components in various machines because its performance determines to operate a machine. Among the actuators, we are focusing on electromagnetic actuators that could be driven at a low voltage, high power, high efficiency, and low cost. Then, the majority of actuators used in macroscopic applications are in this type. Recently, the size reduction and sophistication are required for parts and devices. Therefore, actuators, which hold big volume and weight with a part of a product, have been required to reduce their size. Nonetheless, electromagnetic actuators are known to be unsuitable for miniaturization because the allowable current carrying capacity is very small when current paths of coil are microscopic, making it difficult to obtain high power. In addition, it is very difficult to process microscopic current paths by mean of conventional machining technology. Therefore, the key technology to realizing practical electromagnetic microactuators is micro-fabrication process. On the other hand, LIGA (German acronym for Lithographite, Galvanoformung, and Abformung) process (Becker et al. 1986) could be used to fabricate nano-and micro-parts for devices. The LIGA is a total process and have three major steps in the process including Xray lithography, electroforming to fabricate metallic molds, and the use of these molds to form required parts of plastic micro structure. The X-rays that are generated by synchrotron radiation have high directivity and transmission characteristics, and could be used to expose photoresist to deep depths of 1 mm or more. In this X-ray lithography, the NewSUBARU synchrotron radiation facility at our university (Ando et al. 1998) was used. This was operated at energy of 1.0 or 1.5 GeV modes. The X-ray exposure at beamline 11 (BL11) of NewSUBARU was carried out with the workpiece held in a specially manufactured nine parts operation exposure stage (Mekaru et al. 2001), in which two axes are moved by piezoelectric elements, while five of other axes are moved using stepping motor; the remaining two axes are rotated by stepping motor. Thus, this X-ray exposure stage could make it feasible to create three-dimensional (3D) structures (Mekaru et al. 2002). In this research, we have achieved development of 3D deep X-ray lithography technique that we used to produce a high aspect ratio spiral microcoil patterns (

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Section: Dipping Methodsmentioning

confidence: 99%

Section: Development Of Microcoilmentioning

confidence: 99%

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Fabrication of high aspect ratio microcoils for electromagnetic actuators

Noda

Setomoto

Hattori

2009

2009 International Symposium on Micro-NanoMechatronics and Human Science

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Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and Next-Generation Microactuators

Noda

Hattori

2010

Next-Generation Actuators Leading Breakthroughs

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Fabrication of microcoils with narrow and high aspect ratio coil lines

et al. 2010

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Recently, there has been a growing requirement to reduce their size of actuators. However, the miniaturization of actuators has made little progress since this requires micro-fabrication, processing, and other new techniques that are not compatible with traditional machining technologies. We have forcused on the fabrication of electromagnetic type microactuators that could be driven at low voltage and with high efficiency but it is well known that existing technologies for miniaturization of these devices are unsuitable because the allowable current path would be too small in microscopic applications. Therefore, we have proposed the development of a spiral microcoil with narrow width and high aspect ratio lines that can be fabricated using X-ray lithography and metallization techniques. We have fabricated spiral structures consisting of coil lines with widths of 10 lm and with aspect ratios of over 5. We have also succeeded in electroforming copper onto seed layers and have demonstrated isotropic copper etching in order to form narrow width coil lines to act as current paths. In addition, we have estimated the suction forces that can be generated by electromagnetic actuators fabricated using these coils. These results give rise to the expectation that practical high performance spiral microcoils could be manufactured using these techniques, in spite of their miniature size.

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Formation of High Aspect Ratio Microcoil Using Dipping Method

Cited by 3 publications

References 9 publications

Fabrication of high aspect ratio microcoils for electromagnetic actuators

Fabrication of high aspect ratio microcoils for electromagnetic actuators

Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and Next-Generation Microactuators

Fabrication of microcoils with narrow and high aspect ratio coil lines

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