“…Similar to the transition from 2D layer-by-layer to 3D island growth, these mounds lead to the reduction of the stress observed in the FF curve. However, the formation of these mounds is not primarily driven by misfit stress, but rather a result of a dewetting process during annealing [12]. According to a theoretical study [13], InAs forms a liquid-like layer on the surface of GaAs at high temperatures above $ 500 3 C. The resulting high mobility allows In atoms to rearrange on the surface, thus providing a kinetic mechanism for the mound formation.…”