1993
DOI: 10.1016/0021-8502(93)90039-c
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Formation of nanometer-sized columns in InP using ultrafine aerosol and dry etching techniques

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Cited by 2 publications
(2 citation statements)
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“…Columnar pillars of InP have been produced having diameters of 20-80 nm (monodisperse, with variations among different samples depending on conditions) [172][173][174]. Sample lengths are typically two to three times the sample diameter.…”
Section: 46mentioning
confidence: 99%
“…Columnar pillars of InP have been produced having diameters of 20-80 nm (monodisperse, with variations among different samples depending on conditions) [172][173][174]. Sample lengths are typically two to three times the sample diameter.…”
Section: 46mentioning
confidence: 99%
“…Often, electrophoretic deposition is combined with the use of a differential mobility analyzer that exploits the differences in the electrical mobility of charged particles to size-select a monodisperse fraction of a polydisperse aerosol. Wiedensohler et al 14) for instance, deposited size-selected charged Ag particles made by evaporation-condensation of silver onto InP structures for application in lasers. Kruis et al 15) , Kennedy et al 16,17) and Krinke et al 18,19) also applied this combined size classification-electrophoretic deposition process, as is discussed in more detail in Chapter 3.1 of this article.…”
Section: Non-vacuum Approachesmentioning
confidence: 99%