Formation of Nanoscale Structures of Silicon Photonics and Optoelectronics by Plasma Chemical Etching

Klimin, Victor S.; Morozova, Julia V.; Markitan, Diana V.; Kessler, Ilaria O.

doi:10.1109/rsemw58451.2023.10202032

2023 Radiation and Scattering of Electromagnetic Waves (RSEMW) 2023

DOI: 10.1109/rsemw58451.2023.10202032

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Formation of Nanoscale Structures of Silicon Photonics and Optoelectronics by Plasma Chemical Etching

Victor S. Klimin,

Julia V. Morozova,

Diana V. Markitan

et al.

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Formation of Nanoscale Structures of Silicon Photonics and Optoelectronics by Plasma Chemical Etching

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References 23 publications

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