Formation of nanoscale structures on the surface of gallium arsenide by local anodic oxidation and plasma chemical etching

Климин, В. С.; Солодовник, М. С.; Lisitsyn, S. A.; Rezvan, A A; Balakirev, S. V.

doi:10.1088/1742-6596/1124/4/041024

Cited by 1 publication

(1 citation statement)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Table 1a shows the effect of modulating different plasma currents on the surface roughness of the substrate with a fixed voltage of 250 V and a bombardment time of 20 min. The number of dissociated plasma particles increases as a result of the increased plasma current so that under the same area, the substrate surface is subjected to physical bombardment and chemical etching [22], and the substrate surface roughness increases. Bombarding the PC substrate at higher voltage plasma with the increasing current resulted in poor heat dissipation on the substrate surface and surface melting, thereby causing roughness reduction.…”

Section: The Influence Of Plasma Bombarding On Substrate Surfacementioning

confidence: 99%

Superhydrophilic Modification of Polycarbonate Substrate Surface by Organic Plasma Polymerization Film

Lin

Wei

et al. 2022

Materials

View full text Add to dashboard Cite

Superhydrophilicity performs well in anti-fog and self-cleaning applications. In this study, polycarbonate substrate was used as the modification object because of the low surface energy characteristics of plastics. Procedures that employ plasma bombardment, such as etching and high surface free energy coating, are applied to improve the hydrophilicity. An organic amino silane that contains terminal amine group is introduced as the monomer to perform plasma polymerization to ensure that hydrophilic radicals can be efficiently deposited on substrates. Different levels of hydrophilicity can be reached by modulating the parameters of plasma bombardment and polymerization, such as plasma current, voltage of the ion source, and bombardment time. The surface of a substrate that is subjected to plasma bombarding at 150 V, 4 A for 5 min remained superhydrophilic for 17 days. After 40 min of Ar/O2 plasma bombardment, which resulted in a substrate surface roughness of 51.6 nm, the plasma polymerization of organic amino silane was performed by tuning the anode voltage and operating time of the ion source, and a water contact angle < 10° and durability up to 34 days can be obtained.

show abstract

Section: The Influence Of Plasma Bombarding On Substrate Surfacementioning

confidence: 99%