Formation of Ohmic Contacts to a Diamond-Like Carbon Layer Deposited on a Dielectric Diamond Substrate

Охапкин, А. И.; Yunin, P. A.; Arkhipova, Ekaterina A.; Kraev, S. A.; Korolyov, S. A.; Дроздов, М. Н.; Shashkin, V. I.

doi:10.1134/s1063782620090213

Cited by 2 publications

(1 citation statement)

References 8 publications

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“…[7] Surface modification and a diamond-like carbon layer have been used to optimize the diamond ohmic contact. [8][9][10] As the common terminations of diamond, hydrogen and oxygen (H-diamond and O-diamond) have demonstrated different surface properties. For instance, H-diamond shows a negative electron affinity (NEA) and surface conductivity, but under continuous low-energy electron irradiation, the secondary electron emission intensity of H-diamonds films is decayed.…”

Section: Introductionmentioning

confidence: 99%

Effect of surface modification on the radiation stability of diamond ohmic contacts

Zhao

Wang

et al. 2024

Chinese Phys. B

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The ohmic contact interface between diamond and metal is essential for the application of diamond detectors. Surface modification can significantly affect the contact performance and eliminate the interface polarization effect. However, the radiation stability of diamond detector is also sensitive to the surface modification. In this work, the influence of surface modification technology on diamond ohmic contact under high-energy radiation was investigated. Before radiation, the specific contact resistivity (ρc ) between Ti/Pt/Au-hydrogen terminated diamond (H-diamond) and Ti/Pt/Au-oxygen terminated diamond (O-diamond) were 2.0 × 10-4 Ω·cm2 and 4.3 × 10-3 Ω·cm2 respectively. After 10 MeV electron radiation, the ρc of Ti/Pt/Au-H-diamond and Ti/Pt/Au-O-diamond were 5.3 × 10-3 Ω·cm2 and 9.1 × 10-3 Ω·cm2 respectively. The change rate of ρc of H-diamond and O-diamond after radiation were 2550% and 112% respectively. The electron radiation promotes the bond reconstruction of diamond surface resulting in the increasing of the ρc .

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Section: Introductionmentioning

confidence: 99%

Effect of surface modification on the radiation stability of diamond ohmic contacts

Zhao

Wang

et al. 2024

Chinese Phys. B

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Multilayer Diamond‐Like Carbon Films on Monocrystalline Diamond

Okhapkin,

Drozdov,

Yunin

et al. 2024

Physica Status Solidi (a)

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Multilayer films of diamond‐like carbon (DLC) on monocrystalline diamond substrates have been for the first time obtained by plasma‐chemical deposition. Their chemical composition and structural and morphological properties are studied. The DLC individual layers differ in their sp3 carbon content. The multilayer nature of the resulting coatings is confirmed by periodic density modulation on the small‐angle X‐ray reflectometry curve and modulations in the CsC8, CsC6, CsC4 lines on the crater depth profile of secondary ions of elements (secondary ion mass spectrometry). The dependence of the deposition rate of multilayer DLC films on diamond, their composition and properties on the argon additive to the reaction gas mixture, as well as on methane flow, pressure and growth time, are studied.

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Formation of Ohmic Contacts to a Diamond-Like Carbon Layer Deposited on a Dielectric Diamond Substrate

Cited by 2 publications

References 8 publications

Effect of surface modification on the radiation stability of diamond ohmic contacts

Effect of surface modification on the radiation stability of diamond ohmic contacts

Multilayer Diamond‐Like Carbon Films on Monocrystalline Diamond

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