2024
DOI: 10.1063/5.0198197
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Formation of oxygen vacancy at surfaces of ZnO by trimethylaluminum

Hyobin Eom,
Woojin Bae,
Ju Young Sung
et al.

Abstract: The two-dimensional electron gas (2DEG) is a group of electrons that can move freely in horizontal dimensions but are confined in the third direction. It has been reported that atomic layer deposition (ALD) of Al2O3 on various reducible n-type oxides can lead to the formation of 2DEG at the heterojunction interfaces, among which ZnO is known to provide promising properties. In this study, we have performed a theoretical analysis using density functional theory calculations combined with experimental investigat… Show more

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