Formation of polycrystalline-silicon films with hemispherical grains for capacitor structures with increased capacitance

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Formation of polycrystalline-silicon films with hemispherical grains for capacitor structures with increased capacitance

Cited by 1 publication

References 9 publications

Influence of the probe sizes on the parameters of the surface morphology of hemispherical-grain polysilicon films: Estimation via atomic-force microscopy

Influence of the probe sizes on the parameters of the surface morphology of hemispherical-grain polysilicon films: Estimation via atomic-force microscopy

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