5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of M 2010
DOI: 10.1117/12.866193
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Formation of self-organized nanostructures on Si surfaces during low energy ion beam erosion

Abstract: Low-energy ion beam erosion has been shown to be a promising alternative approach for generation of self-organized patterns on crystal surfaces. In addition to the removal of material from the surface due to sputtering caused by energy and momentum transfer from the incoming ions to target atoms, the interplay between sputter-induced roughening (result in a rough surface) and various surface relaxation mechanisms(result in a smooth surface) can lead to a wide range of well ordered patterns on the surface. In t… Show more

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