Formation of SiO2/Si3N4/SiO2Positive and Negative Electrets on a Silicon Substrate

Crain, Mark M.; McNamara, Shamus; DePuy, Gail W.; Keynton, Robert

doi:10.1109/jmems.2016.2617198

Cited by 3 publications

(3 citation statements)

References 54 publications

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“…To be more precise, the amphoteric traps in SiN x electret, which are caused by the dangling bonds, are responsible for the surface charging 41 . In this model, both electron and hole charge states are charged attributed to the trivalent Si (Si 3+ ) center.…”

Section: Characterizations Of the Sin X Electretmentioning

confidence: 99%

Boosting the electron beam transmittance of field emission cathode using a self-charging gate

Xiao,

Du,

Sun

et al. 2024

Nat Commun

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The gate-type carbon nanotubes cathodes exhibit advantages in long-term stable emission owing to the uniformity of electrical field on the carbon nanotubes, but the gate inevitably reduces the transmittance of electron beam, posing challenges for system stabilities. In this work, we introduce electron beam focusing technique using the self-charging SiNx/Au/Si gate. The potential of SiNx is measured to be approximately −60 V quickly after the cathode turning on, the negative potential can be maintained as the emission goes on. The charged surface generates rebounding electrostatic forces on the following electrons, significantly focusing the electron beam on the center of gate hole and allowing them to pass through gate with minimal interceptions. An average transmittance of 96.17% is observed during 550 hours prototype test, the transmittance above 95% is recorded for the cathode current from 2.14 μA to 3.25 mA with the current density up to 17.54 mA cm−2.

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Section: Characterizations Of the Sin X Electretmentioning

confidence: 99%

Boosting the electron beam transmittance of field emission cathode using a self-charging gate

Xiao,

Du,

Sun

et al. 2024

Nat Commun

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“…Electret materials have been used in various fields, such as pressure sensors, barometers and acoustic transducers in microphones [1][2][3][4][5] , thanks to the quasipermanent electric charge feature in electrets. Recently, electrets have been explored for use in new applications in MEMS vibration energy harvesters that are based on electrostatic induction [6][7][8][9][10][11][12] .…”

Section: Introductionmentioning

confidence: 99%

Spray-coated electret materials with enhanced stability in a harsh environment for an MEMS energy harvesting device

Luo

Zhang

et al. 2021

Microsyst Nanoeng

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The charge stability of electret materials can directly affect the performance of electret-based devices such as electrostatic energy harvesters. In this paper, a spray-coating method is developed to deposit an electret layer with enhanced charge stability. The long-term stability of a spray-coated electret is investigated for 500 days and shows more stable performance than a spin-coated layer. A second-order linear model that includes both the surface charge and space charge is proposed to analyze the charge decay process of electrets in harsh environments at a high temperature (120 °C) and high humidity (99% RH); this model provides better accuracy than the traditional deep-trap model. To further verify the stability of the spray-coated electret, an electrostatic energy harvester is designed and fabricated with MEMS (micro-electromechanical systems) technology. The electret material can work as both the bonding interface and electret layer during fabrication. A maximum output power of 11.72 μW is harvested from a vibrating source at an acceleration of 28.5 m/s2. When the energy harvester with the spray-coated electret is exposed to a harsh environment (100 °C and 98% RH), an adequate amount of power can still be harvested even after 34 h and 48 h, respectively.

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“…Their use for applications is not a recent trend and a renewed interest has accelerated in the recent years with the motivation to replace conventional polluting and cumbersome embedded batteries and to facilitate the development of fully autonomous EEH particularly for wireless applications . Oxides such as silicon oxide (SiO 2 ), silicon nitride (Si 3 N 4 ), combined SiO 2 /Si 3 N 4 , or aluminum oxide (Al 2 O 3 ) have proven to be interesting electrets for integration in microelectromechanical systems (MEMS) . However, these oxides cannot be chosen if it is desired to develop flexible or large‐scale transducers that exceed the conventional dimensions found in MEMS and also for low‐cost transducers.…”

Section: Introductionmentioning

confidence: 99%

Outstanding performance of parylene polymers as electrets for energy harvesting and high‐temperature applications

Lagomarsini

Jean‐Mistral

Kachroudi

et al. 2019

J of Applied Polymer Sci

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Parylene C is used in many applications due to its high properties but it remains a material with moderate performance as long as it is intended for use as an electret. Hence, the generally accepted idea, rightly so, in the scientific and industrial community not to necessarily select parylene (i.e., parylene C) for applications where the endurance of the electret is a strong criterion. Our study provided a new perspective on the performance of parylenes as electret. In this case, we will talk about fluorinated Parylenes of the VT‐4 type and especially AF‐4 variant. Their thermal stability is outstanding and a charge stability is almost total up to 100 °C. A 50% reduction in the charge is recorded at a temperature as high as of 220 °C (9 μm thick Parylene AF‐4), making it one of the most efficient polymer electrets to date. Negatively and positively charged Parylene AF‐4 electrets presented similar performance over long durations, which is out of ordinary for the commonly employed polymeric electrets. Finally, these fluorinated polymers are therefore particularly promising new candidates for applications in electret‐based converters for energy harvesting. © 2019 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2020, 137, 48790.

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Formation of SiO₂/Si₃N₄/SiO₂Positive and Negative Electrets on a Silicon Substrate

Cited by 3 publications

References 54 publications

Boosting the electron beam transmittance of field emission cathode using a self-charging gate

Boosting the electron beam transmittance of field emission cathode using a self-charging gate

Spray-coated electret materials with enhanced stability in a harsh environment for an MEMS energy harvesting device

Outstanding performance of parylene polymers as electrets for energy harvesting and high‐temperature applications

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