The purpose of this work is to reveal the patterns of formation of the structure of the surface layer of high-chromium steel subjected to nitriding in a low-pressure gas discharge plasma using a plasma generator with a hot cathode "PINK". Heating of the samples to the nitriding temperature was carried out by the ionic component of the plasma, as well as by the electron and ionic components of the plasma (elion mode). The object of the study was heat-resistant corrosion-resistant steel of the austenitic class grade 20X23H18 (foreign analogue of AISI310S). The relevance of research is due to the relatively low level of hardness and wear resistance of steels of this class. Nitriding of steel was carried out on the TRIO installation, retrofitted with a switching unit for implementing the aelion (electronic and ionic) processing mode. It has been established that the thickness of the hardened layer is (55-60) pm and weakly depends on the method of nitriding, temperature (in the range of 793-873 K), and duration (3-5 hours) of the process. A nitriding regime has been revealed that makes it possible to form a surface layer with a microhardness of 13.7 GPa (ionic heating mode) and 10.8 GPa (elion heating mode). It has been established that the high strength and tribological properties of nitrided steel are due to the formation of a nanocrystalline structure in the surface layer, the main phases of which are iron nitrides Fe4N and chromium nitrides CrN. It is shown that heating the samples to the nitriding temperature in the aelion mode, which uses the electron and ion components of the plasma, leads to a significantly lower level of material roughness compared to the samples heated during nitriding by the ion component of the plasma.