Formation of TiC-TiN Composite Films by RF Sputtering and Their Tribological Properties.

Imada, Y.; Hyakutake, Hideharu; Honda, Fuminori; Nakajima, K.

doi:10.4139/sfj.48.723

J. Surf. Finish Soc. Jpn.

1997

DOI: 10.4139/sfj.48.723

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Formation of TiC-TiN Composite Films by RF Sputtering and Their Tribological Properties.

Y. Imada¹,

Hideharu Hyakutake

Fuminori Honda³

et al.

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Formation of TiC-TiN Composite Films by RF Sputtering and Their Tribological Properties.

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