2022
DOI: 10.1088/1742-6596/2155/1/012005
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Formation tantalum coating on NiTi surface by magnetron sputtering technique

Abstract: The materials of research the structure and morphology of the tantalum coating on the surface of the NiTi alloy in this work presents. Tantalum was deposited by the DC - magnetron sputtering method. The influence of the energy supplied to the magnetron on the formation of the Ta-coating is shown.Changes in the structure of the coating at different stages of its formation are shown.It was found that with a significant decrease in the energy supplied to the magnetron, tantalum is deposited more uniformly. Beside… Show more

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Cited by 2 publications
(2 citation statements)
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“…Ta coating synthesis parameters was follow: plasma-forming gas-argon, residual gas pressure in the working chamber-3 × 10 −5 Pa, distance from target to substrate 50 mm. The technique for synthesizing coatings is described in detail elsewhere [35,37] The purpose of this work is the synthesis of tantalum coating in the α-Ta structural state by magnetron sputtering without subsequent heat treatment. To achieve this goal the power on magnetron and time of coating application were varied.…”
Section: Experimental Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Ta coating synthesis parameters was follow: plasma-forming gas-argon, residual gas pressure in the working chamber-3 × 10 −5 Pa, distance from target to substrate 50 mm. The technique for synthesizing coatings is described in detail elsewhere [35,37] The purpose of this work is the synthesis of tantalum coating in the α-Ta structural state by magnetron sputtering without subsequent heat treatment. To achieve this goal the power on magnetron and time of coating application were varied.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…This will help to reduce stresses at the 'coating-substrate' interface and form a more uniform coating due to easier migration over the substrate surface. In previous works, the effects of a change in the power of magnetron were noted, displayed in a change in the surface morphology, density of the surface layer, shape and size of grains, and a decrease in the oxygen content [30][31][32][33][34][35].…”
Section: Introductionmentioning
confidence: 96%