Four ribbons of double-layer graphene suspending masses for NEMS applications

Abstract

Graphene ribbons with a suspended proof mass for nanomechanical systems have been rarely studied. Here, we report three types of nanomechanical devices consisting of graphene ribbons (two ribbons, four ribbons-cross and four ribbons-parallel) with suspended Si proof masses and studied their mechanical properties. The resonance frequencies and built-in stresses of three types of devices ranged from tens of kHz to hundreds of kHz, and from 82.61 MPa to 545.73 MPa, respectively, both of which decrease with the increase of the size of proof mass. The devices with four graphene ribbons featured higher resonance frequencies and spring constants, but lower built-in stresses than two ribbon devices under otherwise identical conditions. The Young’s modulus and fracture strain of double-layer graphene were measured to be 0.34 TPa and 1.13% respectively, by using the experimental data and finite element analysis (FEA) simulations. Our studies would lay the foundation for understanding of mechanical properties of graphene ribbons with a suspended proof mass and their potential applications in nanoelectromechanical systems.