Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration

Lukes, Sarah J.; Downey, Ryan D.; Kreitinger, Seth; Dickensheets, David L.

doi:10.1364/ao.55.005208

Cited by 8 publications

(2 citation statements)

References 46 publications

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“…This does not represent the full range of values that can be achieved. A more in-depth analysis of the spherical aberration adjustment performance that can be realized using a deformable mirror that is similar to that of this paper was conducted by Lukes et al 58 .…”

Section: Methodsmentioning

confidence: 68%

MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

2019

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Laser scanning microscopes can be miniaturized for in vivo imaging by substituting optical microelectromechanical system (MEMS) devices in place of larger components. The emergence of multifunctional active optical devices can support further miniaturization beyond direct component replacement because those active devices enable diffraction-limited performance using simpler optical system designs. In this paper, we propose a catadioptric microscope objective lens that features an integrated MEMS device for performing biaxial scanning, axial focus adjustment, and control of spherical aberration. The MEMS-in-the-lens architecture incorporates a reflective MEMS scanner between a low-numerical-aperture back lens group and an aplanatic hyperhemisphere front refractive element to support high-numerical-aperture imaging. We implemented this new optical system using a recently developed hybrid polymer/silicon MEMS three-dimensional scan mirror that features an annular aperture that allows it to be coaxially aligned within the objective lens without the need for a beam splitter. The optical performance of the active catadioptric system is simulated and imaging of hard targets and human cheek cells is demonstrated with a confocal microscope that is based on the new objective lens design.

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Section: Methodsmentioning

confidence: 68%

MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

2019

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“…Piezo actuator-driven AO components [ 6 ] provide here wavefront correction over optical apertures of more than 20 mm. Furthermore, a segmented AO design allows to correct for several types of aberration, such as defocusing, comas, and astigmatism [ 7 , 8 ]. The induced deformation in the AO component typically can lead to a wavefront correction in the range of 10 to 20 waves (about 5–10 µm).…”

Section: Introductionmentioning

confidence: 99%

Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror

2021

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Adaptive optical (AO) components play an important role in numerous optical applications, from astronomical telescopes to microscope imaging systems. For most of these AO components, the induced wavefront correction, respectively added optical power, is based on a rotationally symmetric or segmented design of the AO component. In this work, we report on the design, fabrication, and characterization of a micro-electronic-mechanical system (MEMS) adaptive membrane mirror in the shape of a parabolic cylinder. In order to interpret the experimental characterization results correctly and provide a tool for future application development, this is accompanied by the setup of an optical simulation model. The characterization results showed a parabolically deformable membrane mirror with an aperture of 8 × 2 mm2 and an adaptive range for the optical power from 0.3 to 6.1 m−1 (dpt). The optical simulation model, using the Gaussian beamlet propagation method, was successfully validated by laser beam profile measurements taken in the optical characterization setup. This MEMS-based adaptive astigmatic membrane mirror, together with the accompanying simulation model, could be a key component for the rapid development of new optical systems, e.g., adaptive laser line generators.

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Varifocal MEMS mirrors for high-speed axial focus scanning: a review

Pribošek,

Bainschab,

Sasaki

2023

Microsyst Nanoeng

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Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as a systematic study of methods reported to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes.

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Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration

Cited by 8 publications

References 46 publications

MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror

Varifocal MEMS mirrors for high-speed axial focus scanning: a review

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