1997
DOI: 10.1002/(sici)1096-9918(199706)25:7/8<488::aid-sia255>3.3.co;2-e
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Fractal Dimension of Thin‐film Surfaces Obtained by Fourier Spectral Analysis

Abstract: The applicability of models based on fractal geometry to characterize thin-Ðlm surfaces was investigated. The fractal geometry of sputtered chromium nitride and silicon nitride thin-Ðlm surfaces was described using Fourier spectral analysis of proÐles from scanning tunnelling microscopy images and atomic force microscopy images.The and coatings were deposited on silicon wafers using reactive magnetron sputtering and varying CrN x SiN x the gas pressure. The columnar structure of the amorphous silicon nitride v… Show more

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Cited by 2 publications
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“…The band gap of about 1.4 eV indicates the presence of Cr(OH) 3 and Cr 2 O 3 . I(z) measurements show the existence of an oxide layer whose thickness exceeds a critical value only after in-situ experiments in the EC STM.…”
Section: Discussionmentioning
confidence: 99%
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“…The band gap of about 1.4 eV indicates the presence of Cr(OH) 3 and Cr 2 O 3 . I(z) measurements show the existence of an oxide layer whose thickness exceeds a critical value only after in-situ experiments in the EC STM.…”
Section: Discussionmentioning
confidence: 99%
“…A planar magnetron was used for layer deposition on Si single crystal wafers [3,4]. Before coating, the substrates were charged in order to be cleaned in an argon atmosphere at a pressure of about 5 Pa by feeding a voltage of about 1.2 kV.…”
Section: Layer Preparationmentioning
confidence: 99%
“…The images may be digital or have to be digitalized and sometimes need to be processed so that the features of fractal objects can be extracted. There are many methods for extraction of fractal dimension from an image all including numerous variations (Pentland, 1984;Clarke, 1986;Dubuc et al, 1989;Theiler, 1990;Miller and Reifenberger, 1992;Chen et al, 1993;Molteno, 1993;Sarkar and Chaudhuri, 1994;Van Put et al, 1994;Douketis et al, 1995;Vazquez et al, 1995;Zahn and Zösch, 1997;Brewer and Di Girolamo, 2006;Oczeretko et al, 2008;Li et al, 2009;Liu et al, 2010).…”
Section: Determination Of Fractal Dimension From Gray-scale Imagesmentioning
confidence: 99%
“…Power spectrum method (Saupe, 1988;Zahn and Zösch, 1997) Method is based on the power spectrum dependence of fractional Brownian motion…”
Section: Determination Of Fractal Dimension From Gray-scale Imagesmentioning
confidence: 99%
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