Fractionized calibration of the sample stage used in an AFM-probe mechanical testing system

Diao, Shen; Li, Xide

doi:10.1016/j.optlaseng.2009.12.005

Cited by 5 publications

(2 citation statements)

References 17 publications

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“…Under a normal situation, the deformation is the coupling of the sensor and the tested object. We have to use the sample stage displacement and the deflection value of the sensor to retrieve the deformation of the tested object [21]. Obviously, in the local deformation stage, the force and deformation signals can be employed to investigate the local material properties of the object, such as reduced Young's modulus with Hertz contact theory in the elastic case and JKR or DMT-based models for the adhesion materials [23].…”

Section: Probe Tip Contacting and Loading The Object Surfacementioning

confidence: 99%

Investigation of loading and force sensing properties of a probe-type microforce sensor with force-distance curves

Sun

Diao

2011

Sci. China Technol. Sci.

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In this paper, the force-distance curves have been employed to investigate the force sensing properties of the probe-type microforce sensors. In the preliminary studies, two kinds of probe-type microforce sensors have been used to load the objects with dry and wetted surfaces. One is a developed piezoresistive cantilever force sensor with sensitivity of 35 N/V and the other an atomic force microscope (AFM) cantilever beam probe with sensitivity of 10.4 nN/V. The force outputs corresponding to the regimes of approaching, indenting, and loading are obtained, and the properties of the stability in the approaching regime of the sensors, local mechanical behavior of the tested objects in the indenting regime, and the force sensing of the global samples are analyzed. Experimental results of this analysis are also presented.force sensor, probe, force-distance curve, mechanical behavior, surface effects Citation:Sun C, Su D C, Li X D. Investigation of loading and force sensing properties of a probe-type microforce sensor with force-distance curves.

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Section: Probe Tip Contacting and Loading The Object Surfacementioning

confidence: 99%

Investigation of loading and force sensing properties of a probe-type microforce sensor with force-distance curves

Sun

Diao

2011

Sci. China Technol. Sci.

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“…Therefore, many methods for measuring the microlens surface profile have been proposed, which can be mainly divided into contact and non-contact measurements. The former includes the scanning electron microscope, atomic force microscope [1][2][3][4][5], etc. This type of instrument provides good accuracy; however, the scanning process is usually time consuming, and the contact probe is likely to scratch the surface of the microlens.…”

Section: Introductionmentioning

confidence: 99%

Automatic optical inspection system for 3D surface profile measurement of multi-microlenses using the optimal inspection path

Yang¹,

Lin²

2014

Meas. Sci. Technol.

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In this paper, an automatic optical inspection system is proposed for measuring the three-dimensional surface profile of multi-microlenses according to the optimal inspection path. The proposed system is applicable for full and sampling inspection of microlens arrays, and has the following contributions: (1) the optimal inspection path of sampling inspection is derived by a Genetic Algorithm considering the acceleration characteristic of the XY-table. (2) The incomplete microlens fringe is removed, and the center of each microlens can be automatically positioned. (3) The phase difference of each neighboring pixel is calculated through the concept of sign reversal in order to rebuild the surface profile. According to the experimental results, the lens sag of microlenses in different sizes can be correctly measured by the proposed system, and a relative error of 3.4% (max) can be achieved. Compared with other methods, the positioning time of the proposed method is shortened by 10% to 30%, validating the practicability of this system.

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Micro- and nano-mechanics in China: A brief review of recent progress and perspectives

Zheng

2018

Sci. China Phys. Mech. Astron.

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Fractionized calibration of the sample stage used in an AFM-probe mechanical testing system

Cited by 5 publications

References 17 publications

Investigation of loading and force sensing properties of a probe-type microforce sensor with force-distance curves

Investigation of loading and force sensing properties of a probe-type microforce sensor with force-distance curves

Automatic optical inspection system for 3D surface profile measurement of multi-microlenses using the optimal inspection path

Micro- and nano-mechanics in China: A brief review of recent progress and perspectives

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