We present mode conversion between the higher order and optical modes in an out-of-plane silicon waveguide exhibiting Berry's phase. Superpositions of the and waveguide modes form quasi-Laguerre-Gaussian modes with total angular momentum of ℏ per photon for a 720 × 600 nm 2 silicon waveguide core. When the waveguide is deflected out-ofplane by 22.5°, 50% mode conversion occurs from the mode to the mode. The concatenation of a quarter wavelength straight section results in an output with . ℏ orbital and . ℏ spin angular momentum per photon. Orbital angular momentum generation in a waveguide platform provides a route for on-chip applications that utilize the angular momentum of light for sensing, optical manipulation, non-linear optics, and communications.