Recently,
Ga2O3-based, solar-blind photodetectors
(PDs) have been extensively studied for various commercial and military
applications. However, to date, studies have focused only on the crystalline
phases, especially β-Ga2O3, and the crystalline
quality must be carefully controlled because of its strong impact
on device characteristics. Based on previous reports, amorphous-semiconductor-based
PDs can also be expected to exhibit excellent photodetection characteristics.
In this work, amorphous gallium oxide thin films were deposited by
radio frequency (RF) magnetron sputtering, and the metal–semiconductor–metal
(MSM) PD was fabricated and compared with a β-Ga2O3 film prepared side-by-side as the control sample. The
as-sputtered film possessed a high density of defects, including structural
disorders, oxygen vacancies, and likely, dangling bonds, resulting
in record-high responsivity (70.26 A/W) for a thin-film-type gallium
oxide PD due to a high internal gain and the contribution of extrinsic
transitions despite a relatively large dark current. The high sensitivity
was further confirmed by a high 250 nm/350 nm rejection ratio exceeding
105, the specific detectivity as large as 1.26 × 1014 Jones, and a cutoff wavelength of 265.5 nm. A rapid recovery
(0.10 s) rather than a strong, persistent photoconductivity was observed
and attributed to effective surface recombination. Our findings contribute
to a more comprehensive understanding of highly nonstoichiometric
amorphous gallium oxide thin films and reveal additional pathways
for the development of high-performance, solar-blind PDs that are
inexpensive, large-area, and suitable for mass production.