Free-Space Optical MEMS

Wu, Ming C.; Patterson, P.R.

doi:10.1016/b978-081551497-8.50009-3

Cited by 2 publications

(3 citation statements)

References 100 publications

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“…Larger mirrors are therefore required to support longer Rayleigh length in higher port-count switches. In an N × N switch, the mirror size scales as N , whereas the linear dimension of the chip scales as N 2 [35]. Large chips are more susceptible to imperfections in mirror angles, which cause walkoff of optical beams at the receiving fibers.…”

Section: Two-dimensional Mems Switchesmentioning

confidence: 99%

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Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

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307

141

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Abstract-The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks. In this paper, we review the current state of the art of MEMS devices and subsystems for lightwave communication applications. Depending on the design, these components can either be broadband (wavelength independent) or wavelength selective. Broadband devices include optical switches, crossconnects, optical attenuators, and data modulators, while wavelength-selective components encompass wavelength add/drop multiplexers, wavelength-selective switches and crossconnects, spectral equalizers, dispersion compensators, spectrometers, and tunable lasers. Integration of MEMS and planar lightwave circuits, microresonators, and photonic crystals could lead to further reduction in size and cost.

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Section: Two-dimensional Mems Switchesmentioning

confidence: 99%

“…The expandability of the 2-D switch has been studied in [34] and [35]. To minimize optical diffraction loss, a confocal geometry is used with the average optical path length equal to the Rayleigh range, which is proportional to the square of the optical beam waist.…”

Section: Two-dimensional Mems Switchesmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

Self Cite

307

141

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“…A micro mirror constitutes a prominent example [4], [5]. In order to fulfil the requirements pertaining to functionality and performance of the MEMS micro mirror, high deflection angles have to be reached [6]. Compared to average MEMS devices, a micro mirror has rather large dimensions in the millimetre range [7].…”

Section: Introductionmentioning

confidence: 99%

Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors

Nabholz

Heinzelmann

Mehner

et al. 2018

J. Microelectromech. Syst.

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Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy consumption, the micro mirror is designed to have high quality factors. In addition, a phase-locked loop guarantees resonant actuation despite the occurrence of frequency shifts. In these cases, the oscillation amplitude of the micro mirror is expected to scale linearly with the actuation input power. Here however, we report on an experimental observation which clearly shows an amplitude depletion that is not in accordance with any linear behaviour. As a consequence, the actuation forces needed to reach the desired oscillation amplitude are by multiples higher than expected. We are able to explain the experimental observations accurately by introducing a single degree-of-freedom model including an amplitude-dependent nonlinear damping term. Remarkably, we find that the nonlinear damping shows a clear gas pressure dependency. We investigate the concepts and compare our findings on two different micro mirror design layouts.

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Free-Space Optical MEMS

Cited by 2 publications

References 100 publications

Optical MEMS for Lightwave Communication

Optical MEMS for Lightwave Communication

Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors

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