Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition

Morita, T.; Kometani, Reo; Watanabe, Keiichiro; Kanda, Kazuhiro; Haruyama, Yuichi; Hoshino, Takayuki; Kondo, Kazushige; Kaito, Takashi; Ichihashi, Toshinari; Fujita, Jun–ichi; Ishida, Masahiko; Ochiai, Yukinori; Tajima, Tsuyoshi; Matsui, Shinji

doi:10.1116/1.1630329

Cited by 125 publications

(78 citation statements)

References 6 publications

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“…4 Alternatively, three-dimensional diamondlike carbon (DLC) structures can be fabricated by FIB-assisted chemical vapor deposition (FIB-CVD) using penanthrene (C 14 H 10 ) as a precursor. 20,21 This technique can be used to either plug the fill hole with DLC or to grow a fill tube directly above the fill hole. The latter approach has the advantage of a glueless joint between the fill tube and the capsule.…”

Section: Resultsmentioning

confidence: 99%

Diamond Ablators for Inertial Confinement Fusion

Biener

Mirkarimi

Tringe

et al. 2006

Fusion Science and Technology

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Diamond has a unique combination of physical properties for the inertial confinement fusion ablator application, such as appropriate optical properties, high atomic density, high yield strength, and high thermal conductivity. Here, we present a feasible concept to fabricate diamond ablator shells. The fabrication of diamond capsules is a multi-step process, which involves diamond chemical vapor deposition on silicon mandrels followed by polishing, microfabrication of holes, and removing of the silicon mandrel by an etch process. We also discuss the pros and cons of coarse-grained optical quality and nanocrystalline chemical vapor deposition diamond films for the ablator application.2

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Section: Resultsmentioning

confidence: 99%

Diamond Ablators for Inertial Confinement Fusion

Biener

Mirkarimi

Tringe

et al. 2006

Fusion Science and Technology

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“…This limitation can be addressed in part with techniques such as multiple-angled exposures, as used in creating arrays of sharp vertical wedge-shaped structures for adhesion (Santos et al 2007). Other promising techniques include chemical vapour deposition induced by focused ion beams (FIB-CVD), which can create almost arbitrary three-dimensional geometries out of many different materials with feature sizes of the order of 80 nm (Morita et al 2003). This technology permits both material addition and removal.…”

Section: Multi-materials Fabrication Methods Challenges and Opportunimentioning

confidence: 99%

Design and fabrication of multi-material structures for bioinspired robots

Cutkosky

Kim

2009

Phil. Trans. R. Soc. A.

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New multi-material rapid prototyping processes are making possible the design and fabrication of bioinspired robot structures that share some of the desirable properties of animal appendages. The structures combine stiff and compliant materials and incorporate sensors and other discrete components, resulting in robots that are less demanding to control than traditionally designed robots and more robust. Current challenges include extending this approach to the structures that involve microscopic as well as macroscopic features.

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“…Material is then milled by blasting the surface with accelerated Gallium ions [72]. The speed of FIB milling is inversely related to the achieved resolution.…”

Section: 4) Focused Ion Beam Lithography and Millingmentioning

confidence: 99%