Free-standing La0.7Sr0.3MnO3 suspended micro-bridges on buffered silicon substrates showing undegraded low frequency noise properties

Liu, S; Guillet, Bruno; Adamo, Carolina; Nascimento, Vanuza Marques Do; Lebargy, Sylvain; Brasse, Gurvan; Lemarié, Franck; Fallah, Jaâfar El; Schlom, Darrell G.; Méchin, Laurence

doi:10.1088/1361-6439/ab16ac

Cited by 13 publications

(9 citation statements)

References 53 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…At a composition near x ≈ 0.33, LSMO exhibits an insulator to metal transition with decreasing temperature, which is associated with a paramagnetic to ferromagnetic transition . Liu et al realized suspended microbridges comprised of LSMO ( x = 0.3) on a silicon substrate using standard MEMS processing techniques . For uncooled bolometers, thermally decoupling the heat sensitive material from the bulk substrate is critical.…”

Section: Emerging Applicationsmentioning

confidence: 99%

Epitaxial Oxides on Semiconductors: From Fundamentals to New Devices

Kumah

Ngai

Kornblum

2019

Adv Funct Materials

View full text Add to dashboard Cite

Functional oxides are an untapped resource for futuristic devices and functionalities. These functionalities can range from high temperature superconductivity to multiferroicity and novel catalytic schemes. The most prominent route for transforming these ideas from a single device in the lab to practical technologies is by integration with semiconductors. Moreover, coupling oxides with semiconductors can herald new and unexpected functionalities that exist in neither of the individual materials. Therefore, oxide epitaxy on semiconductors provides a materials platform for novel device technologies. As oxides and semiconductors exhibit properties that are complementary to one another, epitaxial heterostructures comprised of the two are uniquely poised to deliver rich functionalities. This review discusses recent advancements in the growth of epitaxial oxides on semiconductors, and the electronic and physical structure of their interfaces. Leaning on these fundamentals and practicalities, the material behavior and functionality of semiconductor-oxide heterostructures is discussed, and their potential as device building blocks is highlighted. The culmination of this discussion is a review of recent advances in the development of prototype devices based on semiconductor-oxide heterostructures, in areas ranging from silicon photonics to photocatalysis. This overview is intended to stimulate ideas for new concepts of functional devices and lay the groundwork for their realization.

show abstract

Section: Emerging Applicationsmentioning

confidence: 99%

Epitaxial Oxides on Semiconductors: From Fundamentals to New Devices

Kumah

Ngai

Kornblum

2019

Adv Funct Materials

View full text Add to dashboard Cite

show abstract

“…27, a typical etching process of ceramic may involve several steps and techniques such as photo-lithography, self-assembly, or micromachining. For example, Liu et al [183] studied the microfabrication of free-standing La 0.7 Sr 0.3 MnO 3 (LSMO) microbridges with thicknesses of 10-100 nm. La 0.7 Sr 0.3 MnO 3 Fig.…”

Section: Etchingmentioning

confidence: 99%

Micro-fabrication of ceramics: Additive manufacturing and conventional technologies

et al. 2021

View full text Add to dashboard Cite

Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear resistance, low density, and favourable mechanical and chemical properties at elevated temperature. However, with the emerging of additive manufacturing, the use of ceramics for functional and structural MEMS raises new opportunities and challenges. This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS, including additive and conventional manufacturing technologies. The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles, main features, and processed materials. Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers, post-processing at the micro-level, resolution, and quality control. The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications, which indicates a promising future.

show abstract

“…The first defines the electrode pads using a potassium iodide solution and the second step defines the bridge geometry of the bolometer using argon ion beam milling down to the silicon substrate. The detailed fabrication process has been published previously [24,25]. The principle of operation of a bolometer and the figure of merits of bolometers are described in reference books [28,29,30].…”

Section: Introductionmentioning

confidence: 99%

Electro-thermal and optical characterization of an uncooled suspended bolometer based on an epitaxial La_0.7Sr_0.3MnO₃ film grown on CaTiO₃/Si

Nascimento¹,

Méchin²,

Liu³

et al. 2020

J. Phys. D: Appl. Phys.

Self Cite

View full text Add to dashboard Cite

The electro-thermal and optical properties of a bolometer based on an La 0.7 Sr 0.3 MnO 3 (LSMO) thin film with a detection area of 100 × 100µm 2 are presented. The LSMO thin film was epitaxially grown on CaTiO 3 /Si and patterned using a two-step etching process of ion-beam etching in argon and of reactive-ion etching in SF 6 , in order to etch LSMO/CaTiO 3 and Si, respectively. The voltage-current (V-I) characteristics of the bolometer were measured in vacuum from 240 to 415 K. From the V-I characteristics and a thermal model of the bolometer, the electrical responsivity was determined and compared to the optical responsivity measured with a laser diode at 635 nm. The noise equivalent power (NEP) as a function of frequency was measured by dividing the spectral noise power density by the optical responsivity. At 300 K and a bias current of 80 µA, the NEP was 2.3×10-11 W•Hz-1/2 in the 20-200 Hz modulation frequency range and the response time was 1.3 ms. The obtained NEP value without any absorbing layer or antennas, combined with the low value of the response time, are a very promising step towards the use of such LSMO-based bolometers for IR or THz detection.

show abstract

Free-standing La_0.7Sr_0.3MnO₃ suspended micro-bridges on buffered silicon substrates showing undegraded low frequency noise properties

Cited by 13 publications

References 53 publications

Epitaxial Oxides on Semiconductors: From Fundamentals to New Devices

Epitaxial Oxides on Semiconductors: From Fundamentals to New Devices

Micro-fabrication of ceramics: Additive manufacturing and conventional technologies

Electro-thermal and optical characterization of an uncooled suspended bolometer based on an epitaxial La_0.7Sr_0.3MnO₃ film grown on CaTiO₃/Si

Contact Info

Product

Resources

About

Free-standing La0.7Sr0.3MnO3 suspended micro-bridges on buffered silicon substrates showing undegraded low frequency noise properties

Cited by 13 publications

References 53 publications

Epitaxial Oxides on Semiconductors: From Fundamentals to New Devices

Epitaxial Oxides on Semiconductors: From Fundamentals to New Devices

Micro-fabrication of ceramics: Additive manufacturing and conventional technologies

Electro-thermal and optical characterization of an uncooled suspended bolometer based on an epitaxial La0.7Sr0.3MnO3 film grown on CaTiO3/Si

Contact Info

Product

Resources

About

Free-standing La_0.7Sr_0.3MnO₃ suspended micro-bridges on buffered silicon substrates showing undegraded low frequency noise properties

Electro-thermal and optical characterization of an uncooled suspended bolometer based on an epitaxial La_0.7Sr_0.3MnO₃ film grown on CaTiO₃/Si