Freeform metrology using subaperture stitching interferometry

Supranowitz, Chris; Lormeau, Jean-Pierre; Maloney, Chris; Murphy, Paul E.; Dumas, Paul

doi:10.1117/12.2257279

Cited by 12 publications

(8 citation statements)

References 1 publication

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“…Furthermore, QED Technologies proposed the aspheric stitching interferometer (ASI) for steep aspheres and freeforms by incorporating near‐null optics which can compensate larger departures and will be addressed in the next subsection. [ 54 ] The subaperture test can also extend the lateral range and enhance the resolution of measurement. A short review of related work on the subaperture test can be found in the work by Chen et al.…”

Section: Interferometric Areal Measurementmentioning

confidence: 99%

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Chen

Xue

Zhai

et al. 2020

Laser & Photonics Reviews

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Freeform optical surfaces are advantageous to optical designers, as they provide additional degrees of freedom for optimization. The loss of rotational symmetry, however, makes measurement of freeforms more challenging. Herein, advances in interferometric areal measurement of freeform optical surfaces, including null tests, non-null tests, near-null tests, and adaptive null tests, are reviewed. Some new developments, in the Hartmann test, deflectometry, and phase retrieval, as representatives of non-interferometric areal measurement, are then presented. Overall, the focus is on single-point-probe-based profilometry categorized into coordinate measurements and slope-or curvature-based measurements. Innovative measurement technology is trying to bridge the gap between high accuracy and high dynamic range as freeform optical surfaces are finding more applications in visible and shorter-wavelength optics.

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Section: Interferometric Areal Measurementmentioning

confidence: 99%

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Chen

Xue

Zhai

et al. 2020

Laser & Photonics Reviews

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“…Freeform optics offers new opportunities as well as new challenges for manufacture and measurement [5]. Surface metrology is essential not only for surface verification but also for closed-loop corrective polishing and machining [6]. This leaves a critical need for flexible and agile measurement technologies.…”

Section: Introductionmentioning

confidence: 99%

Wavefront aberrations measurement of freeform surface based on computer-generated hologram technology

Wei,

Xu,

2023

Fifth International Symposium on High Power Laser Science and Engineering (HPLSE 2023)

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“…Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15]. Comparing the measurements of selected asphere and freeform surfaces is important in order to allow the performance of these measuring systems to be assessed.…”

Section: Introductionmentioning

confidence: 99%

Comparison of form measurement results for optical aspheres and freeform surfaces

Fortmeier

Schulz

2022

Meas. Sci. Technol.

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Comparing form measurement data for aspheres and freeform surfaces is an important tool for ensuring the quality and functionality of the devices used to take such measurements and may also allow the underlying measurement methods to be evaluated. However, comparing the highly accurate form measurements of such complex surfaces is a demanding task. It is diﬃcult to analyze measurement results whose accuracies are in the range of several tens of nanometers root-mean-square, especially when comparing data with diﬀerent, and anisotropic distributions of the 3D measurement points on the surface under test. In this paper, we investigate eight diﬀerent 3D measurement point distributions that are typical of highly accurate measurement systems currently in use and demonstrate the eﬀects of these distributions on the comparison results by using virtually generated data and applying diﬀerent evaluation strategies. The results show that, for the examples investigated, the diﬀerent 3D measurement point distributions can yield diﬀerent levels of accuracy for the comparison. Furthermore, an improved evaluation procedure is proposed and recommendations on how to signiﬁcantly reduce the inﬂuence of the diﬀerent 3D measurement point distributions on the comparison result are given. A method of employing virtually generated test data is presented that may be generalized in order to further improve and validate future comparison methods.

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Freeform metrology using subaperture stitching interferometry

Cited by 12 publications

References 1 publication

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Wavefront aberrations measurement of freeform surface based on computer-generated hologram technology

Comparison of form measurement results for optical aspheres and freeform surfaces

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