Freeform surface adaptive interferometry assisted with simulated annealing-hill climbing algorithm

Zhang, Lei; Liu, Renhu; Wu, Jinling; Cheng, Zhongtao; Zhou, Sheng; Li, Jingsong; Yu, Benli

doi:10.1016/j.measurement.2021.109597

Cited by 9 publications

(2 citation statements)

References 39 publications

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“…However, both coordinate measuring machines and profilers exhibit problems, such as insufficient number of sampling points, low accuracy, and low efficiency. Interference measurement technology exhibits advantages such as large measurement range, high sensitivity, and high accuracy, and it is currently an important means of measuring the surface shape of optical elements [7,8]. For the tested components that cannot be fully measured in one interferometric measurement, a combination of interferometric measurement and sub-aperture stitching measurement can be used to achieve measurement.…”

Section: Introductionmentioning

confidence: 99%

Measurement method for large aperture angle incomplete spherical surface stitching based on confocal focusing

Wang,

Yang,

Zhao

et al. 2024

Meas. Sci. Technol.

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In traditional stitching measurements, the central sub-aperture is usually used as the reference and is not suitable for incomplete spherical surfaces without central sub-aperture. The measurement of each sub-aperture requires manual readjusting the position and attitude of the measured component, resulting in low measurement accuracy and low measurement efficiency. In response to this issue, this study proposed a method based on confocal focusing for large aperture angle incomplete spherical surface stitching measurement. Automatically and accurately determine the position of the common focus through confocal focusing technology, the positioning accuracy of the measured component is improved. A sub-aperture stitching model was built, coordinate mapping rotation algorithm and overlapping area error compensation algorithm were applied to the surface shape of each sub-aperture, achieving stitching measurement of large aperture angle incomplete spherical surfaces.Finally, the confocal interference stitching measurement system was built to carry out stitching experiments of sphere and large aperture angle incomplete spherical surface. The stitching experimental results indicated that the method increases the measurement accuracy of PV by 2.2 times, increases the measurement accuracy of RMS by 2.3 times, and increases the measurement efficiency by 1.6 times. Therefore, this method provides a high-precision measurement method for detecting large aperture angle spherical surface shape.

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Section: Introductionmentioning

confidence: 99%

Measurement method for large aperture angle incomplete spherical surface stitching based on confocal focusing

Wang,

Yang,

Zhao

et al. 2024

Meas. Sci. Technol.

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“…While the tilt error detection technique has achieved a certain degree of maturity, the predicament surrounding piston error detection remains unresolved, primarily attributable to issues such as 2π blurring and related challenges [5]. Various methodologies are available for the detection of segmented plane mirrors, including broad-and narrow-band Shack-Hartmann detection [6], dispersion fringe method [7], pentaprism scanning detection [8], dual-wavelength co-phase detection [9], and interference detection method [10]. Refer to Table 1 for an elucidation of their respective merits and demerits.…”

Section: Introductionmentioning

confidence: 99%

Investigation into the Co-Phase Detection Methodology for Segmented Plane Mirrors Utilizing Grazing Incidence Interferometry

Liu,

Guo,

2024

Sensors

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Segmented plane mirrors constitute a crucial component in the self-aligned detection process for large-aperture space optical imaging systems. Surface shape errors inherent in segmented plane mirrors primarily manifest as tilt errors and piston errors between sub-mirrors. While the detection and adjustment techniques for tilt errors are well-established, addressing piston errors poses a more formidable challenge. This study introduces a novel approach to achieve long-range, high-precision, and efficient co-phase detection of segmented plane mirrors by proposing a segmented plane mirror shape detection method based on grazing incidence interferometry. This method serves to broaden the detection range of piston errors, mitigate the issue of the 2π ambiguity resulting from piston errors in co-phase detection, and extend the detection capabilities of the interferometer. By manipulating the incident angle of the interferometer, both rough and precise adjustments of the segmented plane mirrors can be effectively executed.

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Enhancement of measurement accuracy of discontinuous specular objects with stereo vision deflectometer

et al. 2022

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Freeform surface adaptive interferometry assisted with simulated annealing-hill climbing algorithm

Cited by 9 publications

References 39 publications

Measurement method for large aperture angle incomplete spherical surface stitching based on confocal focusing

Measurement method for large aperture angle incomplete spherical surface stitching based on confocal focusing

Investigation into the Co-Phase Detection Methodology for Segmented Plane Mirrors Utilizing Grazing Incidence Interferometry

Enhancement of measurement accuracy of discontinuous specular objects with stereo vision deflectometer

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