Frequency-Dependent Electrical and Thermal Response of Heated Atomic Force Microscope Cantilevers

Microcantilever hotplates: Design, fabrication, and characterization

“…7. Our group has previously used Raman spectroscopy to calibrate temperature of heated AFM cantilevers [14,30] and the technique is reviewed only briefly here. Raman spectroscopy measures the inelastic scattering of light from materials which results from changes in the polarizability of the atoms.…”

Microcantilever actuation via periodic internal heating

“…A detailed description of the cantilever frequency-dependent electrical and thermal characteristics of heated silicon microcantilevers is described in our previous work. 16 However, no published report has shown the mechanical response of this type of cantilever under periodic thermal actuation.…”

“…Figures 2͑a͒ and 2͑b͒ show the actuation amplitude and phase upon sinusoidal excitations, V sin͓2͑f 0 / n͒t͔, when V rms = 1 V and n =1-3. The cantilever has multiple thermal time constants, 16 the lowest of which is about 2 kHz, and the actuation amplitude starts to attenuate beyond this. However, the actuation is significantly amplified near the resonance.…”

2-ω and 3-ω temperature measurement of a heated microcantilever

“…11,[20][21][22] A few articles have investigated the thermal behavior of heated AFM cantilevers during periodic heating. 10,23 While these articles describe the linear and nonlinear frequency-domain behaviors of a heated AFM cantilever, they do not provide a clear methodology for measuring periodic cantilever temperature.…”