Frequency-Domain ILC Approach for Repeating and Varying Tasks: With Application to Semiconductor Bonding Equipment

Abstract

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On inversion-based approaches for feedforward and ILC

“…II) Non-square: systems with a different number of inputs and outputs cannot be directly inverted as in (1) since D is non-square.…”

“…The aim of this paper is to investigate, compare, and develop inversion techniques for the purpose of both feedforward and learning control. The model to be inverted includes the closed-loop process sensitivity in iterative learning control (ILC) [1,2], the closed-loop complementary sensitivity in repetitive control [3], or the open-loop system in inverse model feedforward [4]. For nonminimum-phase or strictly proper systems, such inversion is not always straightforward.…”

Sparse iterative learning control with application to a wafer stage: Achieving performance, resource efficiency, and task flexibility

“…7.1]. Interestingly, in the context of ILC, the idea of enforcing sparsity followed by a reestimation step essentially has the same role as a Q-filter in traditional ILC, see [5] for details.…”

Iterative Learning Applied to Hydraulic Pressure Control

“…For systems performing repetitive tasks, ILC has been shown to be capable of significantly improving the system's performance (Blanken et al, 2017), with several industrial applications having been reported (Boeren et al, 2016). Originating from the field of industrial robotics where industrial manipulators are often used to perform the same tasks repetitively (Wallén, 2011), ILC takes advantage of the repetitive nature of the system in order to improve the performance iteratively.…”