Frequency split suppression of fused silica micro shell resonator based on rotating forming process

Li, Bin; Xi, Xiang; Lü, Kun; Yan, Shuhua; Xiao, Dingbang; Wu, Xuezhong

doi:10.1007/s00542-020-05034-x

Cited by 7 publications

(3 citation statements)

References 35 publications

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“…non-Newtonian behaviour), as well as the variation of the viscosity with temperature, needs to be considered in the reow model, because no relevant data are available for the dependence of the viscosity of the fused silica substrate on shear rate. Therefore, when establishing the simulation, the non-isothermal fluid problem was used to analyse the reow process of the molten quartz substrate and the viscosity-temperature relationship is described by Fulcher's law, expressed as [23,25,31] ( )…”

Section: Simulation Setup and Analysismentioning

confidence: 99%

Theoretical prediction of soft-forming micro-hemispherical shells from fused silica substrates in reclining mold

Yang,

Xia,

et al. 2024

Phys. Scr.

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A reclining mold can support the soft forming of fused silica substrates into micro-hemispherical shells with the same height, which makes the processing of micro-hemispherical shells attractive. Currently, it is difficult to determine the optimal process parameters for machining micro-hemispherical shells, and several iterations of experiments are required. This process wastes large amounts of substrate material, experimental consumables, and machining time, and increases the cost of the experiments. In this paper, we report a reflow process for soft-forming micro-hemispherical shells from fused silica substrates supported by a reclining mold. The shapes of the shells formed from the fused silica substrates in reclining and non-reclining molds were analysed by building a two-dimensional model. Moreover, we predicted the effects of varying the process parameters on the shell-forming time and geometrical parameters, as well as the stresses and deformations of the shells after cooling. The effect of the eccentricity of the central support column of the mold on the symmetry of micro-hemispherical shells was also investigated, and the influence of the mold and substrate heating inhomogeneity on micro-hemispherical shell formation was analysed. Additionally, the heat uniformity of the substrate in the rotating state was examined. Finally, we investigated the temperature field and thickness distribution during the shell-forming process through 3D modelling to verify the 2D modelling results. Analysing and predicting the parameters helps to reduce the number of trial-and-error processes in experiments, and we expect this work to provide a theoretical parametric basis for micro-hemispherical shell machining.

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Section: Simulation Setup and Analysismentioning

confidence: 99%

Theoretical prediction of soft-forming micro-hemispherical shells from fused silica substrates in reclining mold

Yang,

Xia,

et al. 2024

Phys. Scr.

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show abstract

“…Considering that the thickness of the metalplated film is only 70 nm, which is far less than the thickness of 150 µm at the thinnest part of the spherical shell, it has little impact on the resonance frequency of the resonator. If it is ignored here, the resonance frequencies of the uncoated FS-MHR and the metal-coated FS-MHR can be expressed by formula (1).…”

Section: Theoretical Model Establishment and Analysismentioning

confidence: 99%

“…Micro-electro mechanical system (MEMS) resonant gyroscope, as a type of sensor, is developing rapidly with characteristics such as small size, low power consumption, high accuracy, and easy integration. It plays an increasingly important role in inertial navigation systems and is widely used in the navigation and positioning of various carriers [1]. As the core component of MEMS resonant gyroscope, micro resonators are used to sense external input angular velocity or angle signals and output corresponding vibration signals [2].…”

Section: Introductionmentioning

confidence: 99%

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

Wang,

Hu,

Zheng

et al. 2023

Meas. Sci. Technol.

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Micro-electro mechanical system resonant gyroscope plays a more and more important role in inertial navigation. As a core sensing component of micro resonant gyroscope, fused silica micro hemispherical resonator (FS-MHR) is widely concerned because of its great performance potential. The resonance frequency is one of the important characteristic parameters of micro resonators, and laser vibration measurement technology is often used for high-precision measurement of this parameter. During the measurement process, it is inevitably affected by the interference of some light sources. To explore how light affects the resonance characteristics of FS-MHR, this paper establishes a relevant theoretical model; and verifies and analyzes the influence of the photothermal effect on the resonance characteristics of FS-MHR through simulation and experiment. Revealed the trend of temperature and resonance frequency changes over time under the same lighting conditions for uncoated and metal-coated films. The measured data shows that the resonance frequency of FS-MHR coated with the metal film is more susceptible to the influence of the photothermal effect. After 60 s of illumination, the resonance frequency will increase by 6.13 Hz, and frequency splitting will also cause a deviation fluctuation of 2.35 Hz under continuous illumination. This will introduce certain errors in the measurement results, and corresponding measures need to be taken to avoid interference from the light source.

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Identification and trimming of the eccentric mass in shell resonators

Chen,

Zeng,

et al. 2024

International Journal of Mechanical Sciences

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Frequency split suppression of fused silica micro shell resonator based on rotating forming process

Cited by 7 publications

References 35 publications

Theoretical prediction of soft-forming micro-hemispherical shells from fused silica substrates in reclining mold

Theoretical prediction of soft-forming micro-hemispherical shells from fused silica substrates in reclining mold

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

Identification and trimming of the eccentric mass in shell resonators

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