Abstract:In this paper, a titanium nitride film (TiN) monolayer film was deposited on a pure Tantalum (Ta) substrate with Ti as an intermediate layer by magnetron sputtering technique, and a Ta/Ti/DLC (diamond-like carbon)/Ti/TiN/DLC multilayer film was designed. Raman spectroscopy and scanning electron microscopy were used to observe the film structure and morphology. Friction and wear properties of Ta/Ti/TiN monolayer film and Ta/Ti/DLC/Ti/TiN/DLC multilayer film were analyzed by UMT-3 tester. The results show that t… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.