Frictional Properties of the Micro-Textured Surface of Anisotropically Etched Silicon

Moronuki, Nobuyuki; Furukawa, Yuji

doi:10.1016/s0007-8506(07)60628-3

Cited by 24 publications

(9 citation statements)

References 7 publications

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“…Moronuki for instance has demonstrated that friction can be reduced for small contact areas and is depending on structure orientation and the materials involved. In this case, for the detection of the tribological properties of micro structured surfaces anisotropically etched silicon has been used [8]. The application of cutting processes for surface structuring of molds and dies for sheet metal forming was investigated regarding the influence on tribological performance and material drawing-in [3].…”

Section: Introductionmentioning

confidence: 99%

Tribological behavior of micro structured surfaces for micro forming tools

Brinksmeier

Riemer

Twardy

2010

International Journal of Machine Tools and Manufacture

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Section: Introductionmentioning

confidence: 99%

Tribological behavior of micro structured surfaces for micro forming tools

Brinksmeier

Riemer

Twardy

2010

International Journal of Machine Tools and Manufacture

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“…Perhaps when the ball slid along the grooves there was a small probability for a very small area of contact to cross an oil reservoir. Moronuki and Furukawa [17] obtained similar results after sliding tests between textured Si and planar Si in a low contact pressure regime. These results were caused by minimizing the adhesion force by the grooves perpendicular to sliding due to water capillary.…”

Section: Introductionmentioning

confidence: 61%

Friction Reduction in Unidirectional Lubricated Sliding Due to Disc Surface Texturing

et al. 2020

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Surface texturing is an option of surface engineering resulting in reduction of friction due to the creation of isolated dimples or grooves on sliding surfaces. The purpose of this work is to find the effect of the groove bottom profiles on the reduction of the friction force. Investigations were conducted using an Optimol SRV5 tribotester equipped with a pin-on-disc module. A disc made of 42CrMo4 steel, with a 100 mm diameter acted as a sample. A counter-sample was made of the same material, however, its diameter was 20 mm. The sliding conditions were selected to be similar to those of a sliding crankpin bearing pad operating in a high-performance internal combustion engine. Surface texturing was found to be beneficial for a reduction in the friction coefficient up to 55% in comparison to the untextured disc. Tribological performances of discs with spiral groove patterns were better than those with a radial layout. In most cases the convergent profile of the groove bottom was superior to the dam shape.

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“…anisotropically etched silicon has been used to detect tribological properties of micro structured surfaces. Friction has been reduced for small contact areas and is depending on structure orientation and the materials involved (Moronuki and Furukawa 2003). Also the running-in characteristic of steel and ceramic in sliding contact is strongly depending on the surface micro structure which has been introduced by the hard machining process (Hwang and zum Gahr 2000).…”

Section: Materials and Surface Effects In Micro Formingmentioning

confidence: 99%

Potentials of precision machining processes for the manufacture of micro forming molds

et al. 2008

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Molds for micro forming processes require specific functional surfaces to provide optimized tribological condition for forming processes. Such topographies with microscopic dimensions can for instance be generated by lithographical methods. However, a main disadvantage of these processes is their low flexibility, e.g. changing the structures to be generated causes extensive adaptations in the manufacturing process. Therefore, mechanical precision machining processes like micro milling, micro grinding and micro polishing are appropriate processes for the manufacture of micro molds of manifold shapes and with well suited micro topographies.

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Frictional Properties of the Micro-Textured Surface of Anisotropically Etched Silicon

Cited by 24 publications

References 7 publications

Tribological behavior of micro structured surfaces for micro forming tools

Tribological behavior of micro structured surfaces for micro forming tools

Friction Reduction in Unidirectional Lubricated Sliding Due to Disc Surface Texturing

Potentials of precision machining processes for the manufacture of micro forming molds

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