1988
DOI: 10.1002/ange.19881000939
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From Carbon Beams to Diamond Films

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Cited by 14 publications
(2 citation statements)
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“…Lifshitz and coworkers have proposed that subplantation, or low energy subsurface implantation, is responsible for compressive stresses in diamondlike carbon thin films. 30,31 They have suggested that shallow implantation of energetic carbon ions to depths of 1-10 nm occurs during diamondlike carbon film growth. The energetic carbon species are trapped and incorporated into the densifying film.…”
Section: Pulsed Laser Deposition Of Diamondlike Carbon Thin Filmsmentioning
confidence: 99%
“…Lifshitz and coworkers have proposed that subplantation, or low energy subsurface implantation, is responsible for compressive stresses in diamondlike carbon thin films. 30,31 They have suggested that shallow implantation of energetic carbon ions to depths of 1-10 nm occurs during diamondlike carbon film growth. The energetic carbon species are trapped and incorporated into the densifying film.…”
Section: Pulsed Laser Deposition Of Diamondlike Carbon Thin Filmsmentioning
confidence: 99%
“…1 Hardness, wear, thermal, and optical features are close to that of diamond films while their preparation is much less critical. 1 Using a mass and energy selected ion beam ͑MESIB͒ source, 2,3 it is possible to produce DLC films in ultrahigh vacuum ͑UHV͒ adjusting sample temperature, flux, incidence angle, and kinetic energy of the incoming ions. The production of Si:C, C:C, and C:H phases takes place in the first stages of DLC film deposition using hydrocarbon ions on Si substrates.…”
Section: Introductionmentioning
confidence: 99%