2023
DOI: 10.2139/ssrn.4472035
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From Design to Realization of High Diffraction Efficiency Littrow Configuration Diffraction Gratings Based on Multilayer Dielectric Mirrors Patterned with Electron Beam Lithography

Andrius Žutautas
1
,
Sigitas Tamulevičius
2
,
Tomas Tamulevičius
3
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