Front End of the Line Process

Han, Jeong Hwan; Cho, Moon Ju; Delabie, Annelies; Park, Tae Joo; Hwang, Cheol Seong

doi:10.1007/978-1-4614-8054-9_7

Cited by 1 publication

(1 citation statement)

References 125 publications

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“…60 When new materials such as the dielectric HfO2 became fundamental for the advancement of the semiconductor industry, [62][63][64][65] so did ALD. 66,67 The push for thinner films, [68][69][70] 3D structures 71,72 and high aspect ratio structures [73][74][75] contributed to the establishment of ALD as a necessary technology in the semiconductor industry as a result of the control of sub-nm thickness, film composition and conformality of the deposition on challenging high aspect ratio structures. The extensive number of possible films that ALD can deposit on a wide range of substrate promoted the expansion of the technology to many different fields other than IC production.…”

Section: Atomic Layer Depositionmentioning

confidence: 99%

Vacuum outgassing characteristics of unpigmented 3D printed polymers coated with atomic layer deposited alumina

Bihari

Heikkinen

Marín

et al. 2020

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Publication I: Strongly reduced thermal conductivity in hybrid ZnO/nanocellulose thin films JH defined the research together with TT, EK and MK. MG participated in the sample preparation and structural characterization, together with JH and TT. Thermal conductivity measurements were performed by AG. The article was written by JH, TT, MK and EK, with critical review and inputs from all authors.Publication II: Flexible thermoelectric modules based on ALD grown ZnO on different substrates MG outlined the idea of the research in collaboration with TT and MK and carried out the fabrication and measurements of all the samples. MG wrote the manuscript in collaboration with the other authors.Publication III: Flexible thermoelectric module utilizing n-type ZnO and p-type PEDOT on textile substrates MG outlined the research with inputs from MK All the manufacture and measuring of the samples was done by MG that wrote the article with inputs and critical review from RF and MK.Publication IV: Atomic layer deposited aluminium oxide mitigates outgassing from fused filament fabrication-based 3-D printed components

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