2015
DOI: 10.1016/j.procir.2015.04.011
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FTS-based Face Milling of Micro Structures

Abstract: This article presents a technical concept and machining possibilities for milling of micro structures with a fast tool servo (FTS). The tool is capable of tool tip displacements with a variable frequency up to 4000 Hz and an amplitude up to 30 μm. The control system of the actuator is linked to the angular spindle position, allowing to freely manipulate the excitation signal. Combining this tool system with a single tooth face milling head, micro structures on flat surfaces can be generated on conventional mil… Show more

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Cited by 13 publications
(2 citation statements)
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“…As for this new micro-/ nano-machining system, structure generation can be regarded as a combination of servo motion-based direct cutting and tertiary motion modulation. Although rotary vibrations have been introduced for the purpose of FTS-milling [29][30][31] and assistance of machining brittle materials [32][33][34], the commonly adopted unidirectional vibrations along the axial direction may significantly restrict flexibility in machining [29][30][31][32][33]. Thus, to realize the RSV process for the secondary nano-structure generation, a piezoelectrically actuated compliant vibrator with spatial vibrations along three translational directions is also introduced.…”
Section: Introductionmentioning
confidence: 99%
“…As for this new micro-/ nano-machining system, structure generation can be regarded as a combination of servo motion-based direct cutting and tertiary motion modulation. Although rotary vibrations have been introduced for the purpose of FTS-milling [29][30][31] and assistance of machining brittle materials [32][33][34], the commonly adopted unidirectional vibrations along the axial direction may significantly restrict flexibility in machining [29][30][31][32][33]. Thus, to realize the RSV process for the secondary nano-structure generation, a piezoelectrically actuated compliant vibrator with spatial vibrations along three translational directions is also introduced.…”
Section: Introductionmentioning
confidence: 99%
“…There are several different variations of FTS, where the classification of each is based on the driving mechanism behind the oscillatory tool. The three most common variations are piezoelectric (PZT) [50,56,90], Lorentz force (LRT) [62,95,108], and Maxwell normal stress motor-driven (MNM) [69,70,105].…”
Section: Fast-tool Servo Turningmentioning
confidence: 99%