Full field and microregion deformation measurement of thin films using electronic speckle pattern interferometry and array microindentation marker method

Li, Xide; Wei, Cheng; Yang, Yan

doi:10.1016/j.optlaseng.2004.09.004

Cited by 25 publications

(8 citation statements)

References 20 publications

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“…Tel: 010-62794410; e-mail: lixide@ tsinghua.edu.cn et al, 2012). Especially, the development of ultrafine displacement or strain measurement techniques with spatial resolution down to the nanometre scale by combining the high-resolution electron microscope and image analysis methods, such as digital image correlation (DIC; Biery et al, 2003;Pan et al, 2009;Zhu et al, 2011), dark field electron holography (Li et al, 2005;Béché et al, 2013) micro-marker method (Li et al, 2005), and geometric phase analysis (Rösner et al, 2010), have caused great interest for many fields, for example, material science (Völkl et al, 1998;Rösner et al, 2010) and particularly the microelectronic industry Yaofeng et al, 2006;Auth et al, 2008). However, SEM imaging is a point wise procedure and exists undesirable scanning drift and magnetic lens distortion during focusing electron beam, which causes serious errors to precise imaging and deformation measurements.…”

Section: Introductionmentioning

confidence: 99%

Correction of image drift and distortion in a scanning electron microscopy

Jin

2015

Journal of Microscopy

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Continuous research on small-scale mechanical structures and systems has attracted strong demand for ultrafine deformation and strain measurements. Conventional optical microscope cannot meet such requirements owing to its lower spatial resolution. Therefore, high-resolution scanning electron microscope has become the preferred system for high spatial resolution imaging and measurements. However, scanning electron microscope usually is contaminated by distortion and drift aberrations which cause serious errors to precise imaging and measurements of tiny structures. This paper develops a new method to correct drift and distortion aberrations of scanning electron microscope images, and evaluates the effect of correction by comparing corrected images with scanning electron microscope image of a standard sample. The drift correction is based on the interpolation scheme, where a series of images are captured at one location of the sample and perform image correlation between the first image and the consequent images to interpolate the drift-time relationship of scanning electron microscope images. The distortion correction employs the axial symmetry model of charged particle imaging theory to two images sharing with the same location of one object under different imaging fields of view. The difference apart from rigid displacement between the mentioned two images will give distortion parameters. Three-order precision is considered in the model and experiment shows that one pixel maximum correction is obtained for the employed high-resolution electron microscopic system.

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Section: Introductionmentioning

confidence: 99%

Correction of image drift and distortion in a scanning electron microscopy

Jin

2015

Journal of Microscopy

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“…To detect the deformation of normal microsamples, markers (20)(21)(22)(23)(24) are widely used to calculate the displacement information. Markers may be dark paints that are sprayed to the microspecimen, (20,21) or array spots (22) of different shapes obtained by milling at the end of a microcantilever, or microarrays (23) indented into the surface of a thin film, or even gold lines (24) deposited on silicon specimens for strain measurement. Besides the high cost for fabricating local features with high precision on the specimens, there are two additional issues that arise in the utilization of the manually specialized "marker" method.…”

Section: Introductionmentioning

confidence: 99%

Measurement of Deformation and Force for Microcantilevers Based on Feature Point Matching and Digital Image Correlation

2015

Sensors and Materials

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Key words: microcantilever, micro force measurement, feature point matching, affine invariant feature descriptor, digital image correlationThe measurement of deformation and force for microcantilevers is an important issue in microassembly. An optical method based on local feature point matching and the digital image correlation (DIC) for deformation and force measurement of microcantilevers is proposed. Images of a microcantilever before and after deformation are obtained by an optical microscope. Using the Laplace-of-Gaussian (LOG) operator, feature points with local extreme response values are detected in the scale space in images before and after deformation. For each LOG feature point, an affine-invariant closed region is extracted based on which the sub-pixel position of the LOG point is relocated as the center of gravity of the closed region and an affine-invariant feature descriptor is constructed. Corresponding points in images before and after deformation are matched according to their affine invariant descriptors. To obtain the displacement of feature points with a higher resolution in bending deformation, the digital image correlation algorithm with a third-order transformation function is used and initialized by the sub-pixel information of matched points. The deformation of the microcantilever can be calculated by fitting the displacement of the matching points with the beam's bending deflection formula under the plane stress condition. Then, the force values as well as the position where the loader comes in contact with the cantilever are calculated through the least-squares method. The validity of the proposed method is verified through experiments on actual microcantilever deformation and comparison with other methods.

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“…1 Cross-section of hierarchical structure in Palmetto wood previously obtained using optical microscopy [3] interferometric techniques like marker techniques [4,5] and digital image correlation [6]. Moire interferometry [7][8][9][10], holographic interferometry [11,12] and speckle interferometry [7,8,[13][14][15][16][17][18] have been employed extensively for nanoscale and microscale deformation measurements.…”

Section: Introductionmentioning

confidence: 99%

Multi-scale Mechanical Characterization of Palmetto Wood using Digital Image Correlation to Develop a Template for Biologically-Inspired Polymer Composites

et al. 2010

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Palmetto wood is garnering growing interest as a template for creating biologically-inspired polymer composites due to its historical use as an energy absorbing material in protective structures. In this study, quasi-static three-point bend tests have been performed to characterize the mechanical behavior of Palmetto wood. Full-field deformation measurements are obtained using Digital Image Correlation (DIC) to elucidate on the strain fields associated with the mechanical response. By analyzing strain fields at multiple length scales, it is possible to study the more homogeneous mechanical behavior at the macroscale associated with the global load-deformation response; while at the microscale the mechanical behavior is more inhomogeneous due to microstructural failure mechanisms. Thus, it was possible to determine that, despite the presence of discontinuous macro-fiber reinforcement, at the macroscale the response is associated with classical bending and progressive failure processes that are adequately described by Weibull statistics proceeding from the tensile side of the specimen. At the microscale, however, the failure mechanisms giving rise to the macroscopic response consist of both shear-dominated debonding between the fiber and matrix, and inter-fiber matrix failure due to pore collapse.These microscale mechanisms are present in both the compressive and tensile regions of the specimen, most likely due to local macro-fiber bending, which is independent of the global bending state. The pore collapse mechanism observed during mechanical loading appears to improve the energy absorption of the matrix material, thereby, transferring less energy and shear strain to the macro-fibermatrix interface for initiation of debonding. However, the pore collapse mechanism can also accumulate substantial shear strain, which results in matrix shear cracking. Through these complex failure mechanisms, Palmetto wood exhibits a high resistance to catastrophic failure after damage initiation, an observation that can be used as inspiration for creating new polymer composite materials.

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Full field and microregion deformation measurement of thin films using electronic speckle pattern interferometry and array microindentation marker method

Cited by 25 publications

References 20 publications

Correction of image drift and distortion in a scanning electron microscopy

Correction of image drift and distortion in a scanning electron microscopy

Measurement of Deformation and Force for Microcantilevers Based on Feature Point Matching and Digital Image Correlation

Multi-scale Mechanical Characterization of Palmetto Wood using Digital Image Correlation to Develop a Template for Biologically-Inspired Polymer Composites

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