2014
DOI: 10.1107/s1600577514016555
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Full-field X-ray reflection microscopy of epitaxial thin-films

Abstract: Novel X-ray imaging of structural domains in a ferroelectric epitaxial thin film using diffraction contrast is presented. The full-field hard X-ray microscope uses the surface scattering signal, in a reflectivity or diffraction experiment, to spatially resolve the local structure with 70 nm lateral spatial resolution and sub-nanometer height sensitivity. Sub-second X-ray exposures can be used to acquire a 14 µm × 14 µm image with an effective pixel size of 20 nm on the sample. The optical configuration and var… Show more

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Cited by 42 publications
(24 citation statements)
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“…focused X-ray methods 400,401 ), and chemical sensitivity (e.g. Raman or secondary ion mass-spectrometry 299,402,403 ).…”
Section: Discussionmentioning
confidence: 99%
“…focused X-ray methods 400,401 ), and chemical sensitivity (e.g. Raman or secondary ion mass-spectrometry 299,402,403 ).…”
Section: Discussionmentioning
confidence: 99%
“…Of particular interest are those X-ray imaging modalities that place no restriction on the sample size nor its geometry and are of applicability to materials in thin-film form; one of the most technologically important class of materials. These modalities consist of: (i) nano- and micro-diffraction probes, whereby a focused beam is rastered across the sample to spatially map the diffracted intensity across a sample [79]; (ii) Bragg ptychography, where a real space image is reconstructed out of overlapping nano-diffraction patterns using phase-retrieval algorithms [10, 11]; (iii) full-field dark field X-ray microscopes which employ a combination of hard X-ray optics to form a real space image of the sample with diffraction contrast [12, 13]. …”
Section: Introductionmentioning
confidence: 99%
“…These imaging modalities are crucial to fundamental investigations of modern materials, which often display a range of structural configurations and order parameter phases. In many cases, some structural phases are not directly discernible by the diffraction-based methods of X-rays and neutron scattering [8, 9] due to either their small volume fraction and/or their lack of long-range periodicity, and therefore require an imaging approach [10, 11] for identification.…”
Section: Introductionmentioning
confidence: 99%