The interconnections in integrated circuits behave as waveguides at high frequencies. A complete solution to Maxwell's equations is therefore necessary to analyze these lines due to the hybrid nature of the modes propagating in the waveguide. This can be a difficult task for interconnections having complex geometries. A surface integral formulation has been used in this article to compute the dispersion characteristics of hybrid modes propagating in the waveguide. The technique used is an extension of previous work and is based on a method of moments procedure to reduce an integro-differential equation into a matrix equation using equivalent surface electric and magnetic currents. 0 1993 John Wiley & Sons, Inc.