2016
DOI: 10.1063/1.4941413
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Fully CMOS-compatible titanium nitride nanoantennas

Abstract: CMOS-compatible fabrication of plasmonic materials and devices will accelerate the development of integrated nanophotonics for information processing applications. Using low-temperature plasma-enhanced atomic layer deposition (PEALD), we develop a recipe for fully CMOS-compatible titanium nitride (TiN) that is plasmonic in the visible and near infrared. Films are grown on silicon, silicon dioxide, and epitaxially on magnesium oxide substrates. By optimizing the plasma exposure per growth cycle during PEALD, ca… Show more

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Cited by 95 publications
(98 citation statements)
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“…All films regardless of substrate temperature and plasma exposure time exhibited smooth surface morphology (Figure 2a). On the other hand, plasma exposure has been known to reduce impurity concentration in ALD films, 29 which would lead to improvement in optical properties.…”
Section: Resultsmentioning
confidence: 99%
“…All films regardless of substrate temperature and plasma exposure time exhibited smooth surface morphology (Figure 2a). On the other hand, plasma exposure has been known to reduce impurity concentration in ALD films, 29 which would lead to improvement in optical properties.…”
Section: Resultsmentioning
confidence: 99%
“…Similar to a previously established method to produce metallic TiN [17,23,24], Tetrakis (dimethylamido) titanium(IV) (99%, Strem Chemical, Newburyport, MA, USA), known as TDMATi, is used as the titanium precursor and heated to 65 • C to increase its vapor pressure. TDMATi is exposed to the chamber for 1000 milliseconds, followed by a 10 s purge under 110 sccm argon.…”
Section: Methodsmentioning
confidence: 99%
“…On the other hand, transition metal nitrides such as titanium nitride (TiN) and zirconium nitride have recently been proposed as plasmonic materials that exhibit gold‐competitive optical properties while also offering compatibility with CMOS technology, thermal and chemical stability, corrosion resistance, as well as improved mechanical strength and durability in comparison to noble metals . For instance, TiN has been shown to exhibit superior performance in local heating and in extremely high temperature applications such as heat‐assisted magnetic recording and solar/thermo‐photovoltaics .…”
Section: Introductionmentioning
confidence: 99%