Fully Differential Actuation and Sensing in Piezoelectric Diaphragm Resonators for High Signal to Background Resonant Sensing

Tiwari, Sudhanshu; Kumar, Rajesh; Chandorkar, Saurabh A.; Pratap, Rudra

doi:10.1109/jmems.2020.3001246

Cited by 5 publications

(4 citation statements)

References 21 publications

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“…All the devices were fabricated on an SOI wafer with a 25 µm device layer thickness. Experimental results from some devices shown in figures 6(a), (c), (d) and 12(b) can be found in other reports [29][30][31][32].…”

Section: Vibration Characterisationsupporting

confidence: 54%

Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate

Tiwari¹,

Kumar²,

Dangi³

et al. 2021

J. Micromech. Microeng.

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This paper reports a generalised process flow for the fabrication of Lead Zirconate Titanate based Piezoelectric Micro Electromechanical System devices. The optimised process can be used to realise several devices with different 1-D and 2-D geometries on a single wafer. All the state-of-the-art fabrication methods introduce some damage to the active piezoelectric material. This damage entails the need for an additional step of recovery anneal in the fabrication process. Our process was designed and optimised to avoid any such damage to the PZT layer. Remnant polarisation and effective transverse piezoelectric coefficient (e31,f) were used as metrics to quantify the damage to the PZT layer. It is shown that our process does not damage the PZT thin film during the fabrication, and hence no recovery anneal is required. We observe a ~3x improvement in remnant polarisation and ~2x improvement in e31,f of PZT thin film compared to the PZT thin film subjected to our previous fabrication process. Moreover, the process explained here uses only wet chemical methods for patterning of contaminating agents (PZT and platinum), making it a cost-effective process.

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Section: Vibration Characterisationsupporting

confidence: 54%

Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate

Tiwari¹,

Kumar²,

Dangi³

et al. 2021

J. Micromech. Microeng.

Self Cite

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show abstract

“…Conversely, these crystalline materials also undergo shape changes when an electric field is applied. This distinctive characteristic renders piezoelectric materials highly suitable for resonator manufacturing [ 32 , 33 , 43 ].…”

Section: Basic Principles Of Fmprsmentioning

confidence: 99%

“…However, since ZnO’s piezoelectric coefficient is significantly lower than that of PZT, another piezoelectric material, substituting ZnO with PZT, presents a simple and logical method to enhance the resonant micro-beam’s sensitivity. This strategy has been validated in research [ 33 , 58 ]. Rosario et al [ 55 ] constructed a piezoelectric-excited millimeter-sized cantilever (PEMC) sensor by combining a 127 µm thick piezoelectric layer (PZT) with a 160 µm thick silicon base layer, as illustrated in Figure 2 f. The study established that the fabricated PEMC sensor could measure gas density changes with an accuracy as low as 0.088 g/L, and a sensitivity equivalent to 0.049 g/(L·Hz).…”

Section: Basic Principles Of Fmprsmentioning

confidence: 99%

“…Piezoelectric excitation is extensively utilized in quartz resonators [ 30 ], zinc oxide (ZnO) resonators [ 31 ], and aluminum nitride (AlN) resonators [ 7 ]. Resonators made from other materials, such as silicon and silicon carbide, typically necessitate the bonding of piezoelectric material like ZnO, AlN, or lead zirconate titanate (PZT) [ 32 , 33 ]. For instance, a zinc oxide thin film sandwiched between two electrodes can be excited; the resulting voltage changes the film’s thickness and lateral dimensions, which can induce flexural mode vibration in the beam.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine

Cai,

Wang,

Cao

et al. 2024

Sensors

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Piezoelectric material-based devices have garnered considerable attention from scientists and engineers due to their unique physical characteristics, resulting in numerous intriguing and practical applications. Among these, flexural-mode piezoelectric resonators (FMPRs) are progressively gaining prominence due to their compact, precise, and efficient performance in diverse applications. FMPRs, resonators that utilize one- or two-dimensional piezoelectric materials as their resonant structure, vibrate in a flexural mode. The resonant properties of the resonator directly influence its performance, making in-depth research into the resonant characteristics of FMPRs practically significant for optimizing their design and enhancing their performance. With the swift advancement of micro-nano electronic technology, the application range of FMPRs continues to broaden. These resonators, representing a domain of piezoelectric material application in micro-nanoelectromechanical systems, have found extensive use in the field of physical sensing and are starting to be used in micropower systems and biomedicine. This paper reviews the structure, working principle, resonance characteristics, applications, and future prospects of FMPRs.

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Significant Enhancement in Operational Bandwidth of ZnO PMUTs due to the Simultaneous Existence of Softening and Hardening Nonlinearity

Kumar

Tiwari

Pratap

2020

2020 IEEE International Ultrasonics Symposium (IUS)

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Fully Differential Actuation and Sensing in Piezoelectric Diaphragm Resonators for High Signal to Background Resonant Sensing

Cited by 5 publications

References 21 publications

Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate

Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine

Significant Enhancement in Operational Bandwidth of ZnO PMUTs due to the Simultaneous Existence of Softening and Hardening Nonlinearity

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