Fully Integrated Front-End CMOS-MEMS Transducer for Low-Cost Real-Time Breath Monitoring

Perelló-Roig, Rafel; Orvay, Francisca; Paul, I. de; Verd, J.; Bota, S.; Segura, J.

doi:10.1109/sensors52175.2022.9967186

Cited by 2 publications

(8 citation statements)

References 24 publications

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“…For example, the authors of [10] have obtained a sensitivity of 0.005% of variation of frequency of resonance per %RH. The authors of [17] have proposed a 4-anchored plate oscillator with a variation of 0.02% of frequency of resonance per %RH. These two examples have a better sensitivity than our sensor, but a complex fabrication is needed, specifically for SAW sensors.…”

Section: Conflicts Of Interestmentioning

confidence: 99%

“…These two examples have a better sensitivity than our sensor, but a complex fabrication is needed, specifically for SAW sensors. Further, technical uncertainties can appear when using the proposal outlined in [17], due to the use of distributed holes in the plate to accomplish resonator releasing.…”

Section: Conflicts Of Interestmentioning

confidence: 99%

“…In comparison with [17][18][19][20], our metal bridge MEMS resonator has a good sensitivity in the minimum detecting area, even without the use of a specific sensing layer over the resonator.…”

Section: Conflicts Of Interestmentioning

confidence: 99%

“…To detect humidity, there are many proposals in the literature, from capacitive [1] or resistive sensors [8,9], surface acoustic waves (SAW) [10][11][12], or sensors based on mechanical resonators [13][14][15][16][17][18][19][20], among others. Most of them require a specifically designed geometry, and some kind of functionalization using a sensitive layer or special materials (2D materials [7], nanoforest structures [12], etc.)…”

Section: Introductionmentioning

confidence: 99%

“…For example, in [17] the authors present a very interesting 4-anchored plate oscillator integrated monolithically with CMOS technology. The plate has dimensions of 41 µm × 10 µm with distributed holes to facilitate the releasing.…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection

Torres,

Uranga,

Barniol

2023

Sensors

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This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a commercial CMOS technology (0.35 μm CMOS-AMS) and monolithically integrated with conditioning and readout circuitry. Sensing is performed through the resonance frequency change due to the addition of water onto the clamped-clamped beam coming from the moisture created by the evaporation of water in the human body. The sensitivity and high-speed response to the addition of water onto the metal bridge, as well as the quick dewetting of the surface, make it suitable for low-power human activity sensing.

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Section: Conflicts Of Interestmentioning

confidence: 99%

Section: Conflicts Of Interestmentioning

confidence: 99%

Section: Conflicts Of Interestmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection

Torres,

Uranga,

Barniol

2023

Sensors

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A 164-dBΩ Transimpedance Amplifier for Monolithic CMOS-MEMS Oscillators in Biosensing Applications

Perelló-Roig,

Barceló,

Verd

et al. 2024

IEEE Access

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This article presents a fully differential tunable high-gain transimpedance amplifier (TIA) conceived as front-end circuit for monolithic CMOS-MEMS resonators operating in self-sustained oscillation mode. The proposed solution is based on a capacitive feedback network topology using a varactor for gain control. The design is specifically oriented to CMOS-MEMS biosensing applications that require post-CMOS MEMS processing. The adoption of a TIA solution provides robustness against one of such processing steps (i.e., oxygen plasma activation) and a 10 improvement in feedthrough signal elimination compared to a single-ended alternative. The ASIC was fabricated using a 0.35-µm commercial CMOS technology from Austria Microsystems featuring a maximum transimpedance gain of 164 dBΩ with a 10-dB tuning range. It operates at frequencies up to 10 MHz with an input-referred current noise density as low as 13 fA•Hz -1/2 providing an exceptional high-performance sensing. With a 3.3 V supply voltage, it exhibits a 1.6 mW power consumption. The presented TIA was integrated on-chip with various MEMS resonator topologies, either oriented to volatile organic compounds (VOCs) detection or to microfluidics integration for Lab-on-Chip (LoC) systems, corroborating self-sustained oscillation with a 135-ppb measured Allan deviation and 1.1 V output voltage swing.INDEX TERMS CMOS-MEMS oscillator, transimpedance amplifier (TIA), Lab-on-Chip (LoC), ASIC. TABLE I LIST OF ABBREVIATIONS AND ACRONYMS USED IN THIS WORK

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Fully Integrated Front-End CMOS-MEMS Transducer for Low-Cost Real-Time Breath Monitoring

Cited by 2 publications

References 24 publications

Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection

Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection

A 164-dBΩ Transimpedance Amplifier for Monolithic CMOS-MEMS Oscillators in Biosensing Applications

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