Fully integrated microfluidic measurement system for real-time determination of gas and liquid mixtures composition

Lötters, Joost Conrad; Groenesteijn, Jarno; Wouden, E.J. van der; Sparreboom, Wouter; Lammerink, Theodorus S.J.; Wiegerink, Remco J.

doi:10.1109/transducers.2015.7181296

Cited by 9 publications

(8 citation statements)

References 8 publications

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“…It is desirable to develop a microfluidic platform [20] which allows various flow sensing functionalities to be realized using the same micromachining technology in a single wafer. Surface Channel Technology (SCT) has been developed for various flow sensing and flow reactor applications, such as micro-Coriolis flow sensors [18,19], fluid parameter sensors [21], control valves [22], pressure sensors [23], thermal flow sensors [24], and micro-gas-burners [25].…”

Section: Surface Channel Technologymentioning

confidence: 99%

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology

et al. 2020

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Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for electrical sensing and actuation purposes. As a result that they are located at the top surface of the microfluidic channels, only topside sensing and actuation is possible. Moreover, in microreactor applications, high temperature degradation of thin film metal layers limits their performance as robust microheaters. In this paper, we report on an innovative idea to make microfluidic devices with integrated silicon sidewall electrodes, and we demonstrate their use as microheaters. This is achieved by modifying the original Surface Channel Technology with optimized mask designs. The modified technology allows to embed heavily-doped bulk silicon electrodes in between the sidewalls of two adjacent free-hanging microfluidic channels. The bulk silicon electrodes have the same electrical properties as the extrinsic silicon substrate. Their cross-sectional geometry and overall dimensions can be designed by optimizing the mask design, hence the resulting resistance of each silicon electrode can be customized. Furthermore, each silicon electrode can be electrically insulated from the silicon substrate. They can be designed with large cross-sectional areas and allow for high power dissipation when used as microheater. A demonstrator device is presented which reached 119.4 ∘ C at a power of 206.9 m W , limited by thermal conduction through the surrounding air. Other potential applications are sensors using the silicon sidewall electrodes as resistive or capacitive readout.

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Section: Surface Channel Technologymentioning

confidence: 99%

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology

et al. 2020

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“…In Lötters et al (2014Lötters et al ( , 2015, Groenesteijn (2016) we proposed a single-chip multi-parameter microfluidic measurement system made in the fabrication process outlined in Sect. 2.…”

Section: Example Channel Designs For a Multi-parameter Flow Sensormentioning

confidence: 99%

A versatile technology platform for microfluidic handling systems, part II: channel design and technology

Groenesteijn

Boer

Lötters

et al. 2017

Microfluid Nanofluid

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integrated devices. The channels can be freely suspended, and top-side, bottom-side and in-plane fluidic interfacing is possible. Transducer structures can be integrated in close proximity to the fluid using suitable materials. In these microfluidic handling systems, many different microfluidic devices can be integrated on the same chip. As a result, these devices are connected with very small internal volumes which allows for fast response times and handling of small sample sizes. Several options are proposed to add functionality to the devices. Some examples of these are: metalization, release of the channels from the bulk or a buried oxide layer to mechanically or electrically isolate parts of the chip or provide buried fluidic channels.In this paper, we discuss several channel etching methods and look at their applicability in the platform. The full fabrication process is discussed in Groenesteijn et al. (2017). The channels are etched isotropically through etch slits in a silicon-rich silicon nitride layer on top of the wafer. As a result, the size and shape of the channels can be tuned to meet the demands of any application. Here, we propose a method, based on an empirical etch model, to design the slit pattern that will result in the desired channel shape.In Sect. 4, the channel design of an integrated microfluidic handling system with multiple fluidic sensors is discussed. Fabrication outlineThe fabrication of the devices can be roughly divided into three main steps: fabrication of the microchannels, fabrication of the functional structures and fabrication of the fluidic access to the channels. In this section, an outline of the fabrication process is given where channels are etched at Abstract Microfluidic devices often require channels of a specific size and shape. These devices are then made in a fabrication process that is often specialized to produce only those (and very similar) channels. As a result, devices requiring channels of different size and shape cannot easily be integrated on the same chip. This paper presents a method to fabricate microfluidic channels in a wide range of shape and size on the same chip by using a slit pattern through which the channels are etched. The fabrication process to fabricate these channels is discussed in detail, and an empirical model is presented to find the optimal slit pattern for a required size and shape. This part of the paper focusses on the channel design and fabrication. Details on the whole fabrication process and optional functionalization of the channels are presented in part I of this paper.

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“…Microfluidic relative permittivity sensors have great potential for fluid discrimination and composition determination [1,2]. Applications include the detection of medicine composition in medical infusion pumps [3], single-cell impedance cytometry [4,5], composition detection in flow chemistry [6,7], production monitoring of polymers [8], void-fraction measurement in two-phase flow [9,10], and measurement of glucose concentration in water [11,12] or water content in oil [13,14].…”

Section: Introductionmentioning

confidence: 99%

“…However, the electric field in these designs is usually limited to the side of the fluidic channel. A much larger capacitance with less parasitic capacitance can be realized by using parallel plate structures, where the fluid is flowing in between the electrodes [3,6,16], but this results in a trade-off between channel diameter and capacitance. Furthermore, most of the current designs require a significant amount of chip area as they use channels parallel to the chip surface.…”

Section: Introductionmentioning

confidence: 99%

“…The sensor can, for instance, be bonded above a fluid inlet or outlet of an existing sensor, such as a micro Coriolis flow sensor [17]. As such, it is very suitable for combination with other sensors in the same package to form an integrated multi-parameter sensor system as proposed in [3]. Figure 1a shows a cross-sectional schematic drawing of the proposed device.…”

Section: Introductionmentioning

confidence: 99%

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A Flow-Through Microfluidic Relative Permittivity Sensor

et al. 2020

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In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and outlet are etched through the handle layer and the interdigitated electrodes are made in the device layer. An impedance analyzer was used to measure the impedance between the interdigitated electrodes for various non-conducting fluids with a relative permittivity ranging from 1 to 41. The sensor shows good linearity over this range of relative permittivity and can be integrated with other microfluidic sensors in a multiparameter chip.

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Fully integrated microfluidic measurement system for real-time determination of gas and liquid mixtures composition

Cited by 9 publications

References 8 publications

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology

A versatile technology platform for microfluidic handling systems, part II: channel design and technology

A Flow-Through Microfluidic Relative Permittivity Sensor

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