2021
DOI: 10.3390/nano11040999
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Functionalization and Characterization of Silicon Nanowires for Sensing Applications: A Review

Abstract: Silicon nanowires are attractive materials from the point of view of their electrical properties or high surface-to-volume ratio, which makes them interesting for sensing applications. However, they can achieve a better performance by adjusting their surface properties with organic/inorganic compounds. This review gives an overview of the main techniques used to modify silicon nanowire surfaces as well as characterization techniques. A comparison was performed with the functionalization method developed, and s… Show more

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Cited by 34 publications
(26 citation statements)
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“…This native oxide is of poor quality and is accompanied by many oxygen-derived defects. Moreover, native oxides are a contamination source by metallic impurities [ 79 ] and are poorly stable in aqueous media [ 80 ]. Native oxide can be easily removed by using either chemical reactants—such as buffer oxide etching (BOE) solution, diluted hydrofluoric acid (HF), HF vapor, and gaseous ammonia (NH 3 )—or by physical etching method including argon (Ar) plasma etching.…”
Section: Silicon Nanowire Propertiesmentioning
confidence: 99%
See 1 more Smart Citation
“…This native oxide is of poor quality and is accompanied by many oxygen-derived defects. Moreover, native oxides are a contamination source by metallic impurities [ 79 ] and are poorly stable in aqueous media [ 80 ]. Native oxide can be easily removed by using either chemical reactants—such as buffer oxide etching (BOE) solution, diluted hydrofluoric acid (HF), HF vapor, and gaseous ammonia (NH 3 )—or by physical etching method including argon (Ar) plasma etching.…”
Section: Silicon Nanowire Propertiesmentioning
confidence: 99%
“…Native oxide can be easily removed by using either chemical reactants—such as buffer oxide etching (BOE) solution, diluted hydrofluoric acid (HF), HF vapor, and gaseous ammonia (NH 3 )—or by physical etching method including argon (Ar) plasma etching. Most of these methods provide hydrogenated surfaces that are an interesting starting point for further functionalization in the frame of sensor applications [ 79 , 81 ].…”
Section: Silicon Nanowire Propertiesmentioning
confidence: 99%
“…In addition, micropatterned 1D, 2D, and 3D Si structures are attractive, label-free, and scalable sensing platforms, owing to their distinctive optical and/or electrical properties and high surface-to-volume ratio, which make them broadly interesting for biomedical applications in healthcare scenarios [ 2 , 3 , 4 ]. For example, Si pillars or nanowire field-effect transistors have been promisingly developed as potentiometric sensor devices for detecting a copious number of chemical and biological species, such as ions, DNA, proteins, and antibodies/antigens [ 5 , 6 , 7 ]. Other remarkable examples include the development of neural modulators [ 8 , 9 ], scaffolds [ 10 , 11 , 12 ], and implantable energy harvesters [ 13 , 14 ].…”
Section: Introductionmentioning
confidence: 99%
“…Modern gas-sensing systems based on nanotechnology may enable reliable and continuous detection of different gaseous compounds to control atmospheric pollutants and protect human health [1][2][3][4][5]. With their quantum-mechanical properties, wide-bandgap semiconductor nanostructures can affect the characteristics of functional devices [6][7][8].…”
Section: Introductionmentioning
confidence: 99%