2021
DOI: 10.1016/j.colsurfb.2021.111787
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Functionalization of TiO2 sol-gel derived films for cell confinement

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Cited by 4 publications
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“…In order to achieve the growth of high-quality TiO2 thin films, research groups have developed a wide variety of deposition methods such as chemical spray pyrolysis [10], sol-gel route [11], chemical vapor deposition process [12], electron-beam evaporation [13], co-precipitation and hydrothermal methods [14], atomic layer deposition [15], pulsed laser deposition [16], ion implantation [17] and direct current (DC) and radio frequency (RF) magnetron sputtering [18,19]. It should be noted that the most important deposition technique in terms of strong stability of the process, high deposition rate, very good thickness uniformity and low substrate temperatures is the RF magnetron sputtering technique; it produces dense and high quality TiO2 thin films with wellcontrolled stoichiometry and high adhesion over a wide range of different types of substrates.…”
Section: Introductionmentioning
confidence: 99%
“…In order to achieve the growth of high-quality TiO2 thin films, research groups have developed a wide variety of deposition methods such as chemical spray pyrolysis [10], sol-gel route [11], chemical vapor deposition process [12], electron-beam evaporation [13], co-precipitation and hydrothermal methods [14], atomic layer deposition [15], pulsed laser deposition [16], ion implantation [17] and direct current (DC) and radio frequency (RF) magnetron sputtering [18,19]. It should be noted that the most important deposition technique in terms of strong stability of the process, high deposition rate, very good thickness uniformity and low substrate temperatures is the RF magnetron sputtering technique; it produces dense and high quality TiO2 thin films with wellcontrolled stoichiometry and high adhesion over a wide range of different types of substrates.…”
Section: Introductionmentioning
confidence: 99%