Fundamental Principles of Inductively Coupled Plasmas

Mermet, Jean‐Michel

doi:10.1002/9780470988794.ch2

Cited by 12 publications

(7 citation statements)

References 188 publications

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“…Higher Η β /H α ratio means higher population at higher excited levels, which also indicated higher electron energy if assuming that the excitation of H atoms is mainly caused by electron impact. More accurately, the emission intensity could be written as I j → k = A j k g j λ j k exp true( − E j − E k k B T e true) where I j → k is the line intensity corresponding to the transition from higher energy level j to lower one k , A jk is the corresponding transition probability, λ jk is the wavelength of the transition, E j − E k is the energy difference between level j and level k , g j is the statistic weight (or degeneracy) of the higher energy level, k B is the Boltamann constant, and T e is the electron temperature.…”

Section: Resultsmentioning

confidence: 99%

Metal Al Produced by H₂ Plasma Reduction of AlCl₃: A Thermodynamic and Kinetic Study on the Plasma Chemistry

et al. 2008

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In this paper we reported that low temperature plasma may reverse the direction of a chemical reaction. The thermodynamically forbidden reaction between H 2 and AlCl 3 was able to take place with the assistance of low temperature plasma, yielding metal Al. The plasma chemistry of the reaction was investigated by optical emission spectroscopy, which suggested that the dissociation of H 2 and AlCl 3 molecules by plasma led the reaction to a thermodynamically favorable one by creating reaction channels with low Gibbs free energy change. The addition of Ar promoted the reaction kinetics dramatically, which was attributed to the enhanced dissociation of AlCl 3 molecules by excited Ar species.

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Section: Resultsmentioning

confidence: 99%

Metal Al Produced by H₂ Plasma Reduction of AlCl₃: A Thermodynamic and Kinetic Study on the Plasma Chemistry

et al. 2008

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“…Natural broadening is on the order of hundreds of picometres (pm) and a 0.05 pm broadening would produce only a 0.04% error in this estimate [33], so this contribution can be neglected. Pressure broadening in inductively coupled plasmas (ICP), which are comparable to PEO plasmas in terms of temperature and pressure, is only a few picometres [34]. A 5.0 pm contribution from pressure broadening would produce a 4% error [34], which was judged to be acceptable and, ultimately, was several times smaller than the experimental uncertainty.…”

Section: Electron Concentration and Temperaturementioning

confidence: 99%

“…Pressure broadening in inductively coupled plasmas (ICP), which are comparable to PEO plasmas in terms of temperature and pressure, is only a few picometres [34]. A 5.0 pm contribution from pressure broadening would produce a 4% error [34], which was judged to be acceptable and, ultimately, was several times smaller than the experimental uncertainty. The electron concentration measurement error (δN e /N e ) was estimated to be ≈15%, which is a reasonable value in such experiments.…”

Section: Electron Concentration and Temperaturementioning

confidence: 99%

Spectroscopic study of electrolytic plasma and discharging behaviour during the plasma electrolytic oxidation (PEO) process

Hussein

Nie

Northwood

et al. 2010

J. Phys. D: Appl. Phys.

521

270

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In this study, a plasma electrolytic oxidation (PEO) process was used to produce oxide coatings on commercially pure aluminium (1100 alloy) at a pulsed dc power mode. The effects of process parameters (i.e. current density and treatment time) on the plasma discharge behaviour during the PEO treatment were investigated using optical emission spectroscopy (OES) in the visible and near ultraviolet (NUV) band (285–800 nm). The elements present in the plasma were identified. Stark shifts of spectral lines and line intensity ratios were utilized to determine the plasma electron concentrations and temperatures, respectively. The plasma electron temperature profile, coating surface morphology and coating composition were used to interpret the plasma discharging behaviour. The different coating morphologies and compositions at different coating surface regions are explained in terms of three types of discharge, which originate either at the substrate/coating interface, within the upper layer, or at the coating top layer. The high spike peaks on the plasma intensity and temperature profiles corresponded to discharges originated from the substrate/coating interface, while the base line and small fluctuations were due to discharges at the coating/electrolyte interface.

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“…The production of 40 Ar 4+ is, to a large extent, controlled by plasma temperature, which in turn is affected by parameters such as RF power, sample gas ow, solvent loading and RF generator characteristics. 45 Gäbler and Bahr 11 reported that the intensity of 40 Ar 4+ interference can be reduced by using a lower radio frequency setting, which is one of the fundamental parameters that inuence the ICP temperature. The results of our study are consistent with those in ref.…”

Section: A Laser Ablation MC Icp-ms Matrix Effectsmentioning

confidence: 99%

Matrix effects during laser ablation MC ICP-MS analysis of boron isotopes in tourmaline

Míková

Košler

Wiedenbeck

2014

J. Anal. At. Spectrom.

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Laser ablation multi-collector inductively coupled plasma mass spectrometry (LA MC ICP-MS) and secondary ion mass spectrometry (SIMS) were used to determine the boron isotopic compositions of several natural tourmaline group minerals (elbaite, schorl and dravite). This study reports on the effects of instrument parameters of LA MC ICP-MS and the composition of sample matrix on data accuracy, reproducibility and repeatability. We demonstrate that the tourmaline matrix has a significant effect on the obtained d11 B values and impacts on data accuracy, with a bias of up to ca. 2.5& if a non matrixmatched reference material is used to calibrate the measurements. In the case of a matrix-matched calibration, the boron isotopic data obtained by LA MC ICP-MS are comparable to the reference TIMS values, with typical repeatability for d 11B results between 0.2 and 0.5& (1s). This is somewhat better compared to the repeatability of 0.8-1.3& (1s) for small format single collector SIMS.

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Fundamental Principles of Inductively Coupled Plasmas

Cited by 12 publications

References 188 publications

Metal Al Produced by H₂ Plasma Reduction of AlCl₃: A Thermodynamic and Kinetic Study on the Plasma Chemistry

Metal Al Produced by H₂ Plasma Reduction of AlCl₃: A Thermodynamic and Kinetic Study on the Plasma Chemistry

Spectroscopic study of electrolytic plasma and discharging behaviour during the plasma electrolytic oxidation (PEO) process

Matrix effects during laser ablation MC ICP-MS analysis of boron isotopes in tourmaline

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Fundamental Principles of Inductively Coupled Plasmas

Cited by 12 publications

References 188 publications

Metal Al Produced by H2 Plasma Reduction of AlCl3: A Thermodynamic and Kinetic Study on the Plasma Chemistry

Metal Al Produced by H2 Plasma Reduction of AlCl3: A Thermodynamic and Kinetic Study on the Plasma Chemistry

Spectroscopic study of electrolytic plasma and discharging behaviour during the plasma electrolytic oxidation (PEO) process

Matrix effects during laser ablation MC ICP-MS analysis of boron isotopes in tourmaline

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Metal Al Produced by H₂ Plasma Reduction of AlCl₃: A Thermodynamic and Kinetic Study on the Plasma Chemistry

Metal Al Produced by H₂ Plasma Reduction of AlCl₃: A Thermodynamic and Kinetic Study on the Plasma Chemistry