1987
DOI: 10.1016/s0003-2670(00)82855-x
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Fundamentals of surface and thin film analysis

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Cited by 246 publications
(225 citation statements)
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“…This reveals preferential sputtering of Zn, contrary to the preferential sputtering of Al that is usually seen in Al-rich quasicrystals and which is attributed to optimal energy transfer between the sputtering gas and an Al atom, compared with other kinds of metal atoms in the alloys [16]. However, it is known that weak bonding also favors preferential sputtering [17]. Since Zn is a poorer mass-match than Al, its preferential sputtering most likely reflects weaker bonding in the solid.…”
Section: Experimental Results and Interpretationmentioning
confidence: 88%
“…This reveals preferential sputtering of Zn, contrary to the preferential sputtering of Al that is usually seen in Al-rich quasicrystals and which is attributed to optimal energy transfer between the sputtering gas and an Al atom, compared with other kinds of metal atoms in the alloys [16]. However, it is known that weak bonding also favors preferential sputtering [17]. Since Zn is a poorer mass-match than Al, its preferential sputtering most likely reflects weaker bonding in the solid.…”
Section: Experimental Results and Interpretationmentioning
confidence: 88%
“…These energies are typical for ion irradiation of materials, and are well known to form heat spikes that can cause massive atom redistribution and relocation, sometimes resulting in cratering. 15,36 The other important result obtained from the PIC simulations is that the ion flux is very high, the total flux ⌫ of both ions and neutrals over all energies being almost ϳ10 25 ions/ cm 2 / s. This flux obtained from PIC may seem very high compared to typical ion irradiation fluxes which are 5-15 orders of magnitude lower 42,43 but a simple estimate from experimental values of the typical currents in arcs on the order of I = 10 A and final crater areas on the order of A = ͑10 m͒ 2 ͑Ref. 3͒ gives a comparable flux of I / e / A =6 ϫ 10 25 ions/ cm 2 / s ͑e is the electron charge͒.…”
Section: Resultsmentioning
confidence: 93%
“…15 The hydrogen and carbon content of the films have been determined with elastic recoil detection analysis ͑ERDA͒ in combination with Rutherford backscattering ͑RBS͒. 16,17 The optical band gap has been obtained with transmission experiments in the range from 400 to 900 nm. 8 These are all standard techniques.…”
Section: Film Analysismentioning
confidence: 99%