1988
DOI: 10.1016/0022-0248(88)90620-3
|View full text |Cite
|
Sign up to set email alerts
|

GaAlInAs ternary and quaternary alloys lattice matched to InP for electronic, optoelectronic and optical device applications, by LP-MOVPE

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

1990
1990
2019
2019

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 19 publications
(2 citation statements)
references
References 36 publications
0
2
0
Order By: Relevance
“…A wide range of growth conditions have been used for Al 0.48 In 0.52 As growth [12][13][14][15][16]. Our initial attempts to grow this alloy at 620 1C produced a poor surface dominated by a rough orange-peel morphology with a high density of droplet defects, over 6 Â 10 6 cm À 2 .…”
Section: Resultsmentioning
confidence: 98%
“…A wide range of growth conditions have been used for Al 0.48 In 0.52 As growth [12][13][14][15][16]. Our initial attempts to grow this alloy at 620 1C produced a poor surface dominated by a rough orange-peel morphology with a high density of droplet defects, over 6 Â 10 6 cm À 2 .…”
Section: Resultsmentioning
confidence: 98%
“…This is especially true for epitaxy on InP (1 0 0) substrates, where a large fraction of the epitaxial structure can be AlInAs or GaInAs alloys. Prior investigation of the growth of these alloys by metal-organic vapor phase epitaxy (MOVPE) allows electronic and optoelectronic epitaxial structures to be fabricated [1][2][3]. Prior studies on InP epitaxy document the importance of small intentional miscuts to achieve low defect densities [4][5][6][7].…”
Section: Introductionmentioning
confidence: 99%