“…This is especially true for epitaxy on InP (1 0 0) substrates, where a large fraction of the epitaxial structure can be AlInAs or GaInAs alloys. Prior investigation of the growth of these alloys by metal-organic vapor phase epitaxy (MOVPE) allows electronic and optoelectronic epitaxial structures to be fabricated [1][2][3]. Prior studies on InP epitaxy document the importance of small intentional miscuts to achieve low defect densities [4][5][6][7].…”