GaAs manufacturing processes conditions for micro- and nanoscale devices

Joint, François; Abadie, Claire; Vigneron, P.; Boulley, L.; Bayle, Fabien; Isac, N.; Cavanna, A.; Cambril, E.; Herth, Étienne

doi:10.1016/j.jmapro.2020.11.006

Cited by 9 publications

(5 citation statements)

References 43 publications

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“…Many innovational methods are exploited for micro/nano manufacturing, such as reactive ion etching [7,8], lithography [9], chemical vapour deposition [10], electrochemical processing [11], template [12], self-assembly [13] etc. But these methods have complicated procedures and multistep, which are time wasted.…”

Section: Introductionmentioning

confidence: 99%

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Laser processing of micro/nano biomimetic structures

Xiao

Liu

et al. 2021

Micro & Nano Letters

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Inspired by nature, many researchers have noticed that the micro-and nano-structures originated from organism's surfaces which indict unique properties such as superhydrophobicity, drag reduction, structure colour have much use in academic value. However, conventional processing methods for mimicking biomimetic surface need multistep and is time wasted, not environmental friendly and uneconomic. Thanks to the development of ultrafast laser technology, the pulse duration can reach femtosecond scale, which can precisely realize micro-and nano-processing in one-step. Here, we introduce and demonstrate the principles of some typical properties. The typical structures caused by interaction between laser and material are discussed. Moreover, laser-processing methods for biomimetic surface are highlighted to achieve specialized performance. This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.

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Section: Introductionmentioning

confidence: 99%

“…FIGURE7 A setup with a clear deviation between the interference and the focal plane and an elliptical spot shape on a stainless steel sample fabricated by the setup[53] …”

mentioning

confidence: 99%

Laser processing of micro/nano biomimetic structures

Xiao

Liu

et al. 2021

Micro & Nano Letters

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“…Elliptical micropillars were fabricated by reactive ion-plasma etching in combination with contact photolithography (365 nm) based on a thick negative photoresist [41][42][43]. The etching technique has been optimized to produce highly vertical side walls with minimum roughness since the verticality of the sidewalls is especially important for precise control of the polarization mode splitting.…”

Section: Fabrication Of the Structurementioning

confidence: 99%

Towards Bright Single-Photon Emission in Elliptical Micropillars

et al. 2023

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In recent years, single-photon sources (SPSs) based on the emission of a single semiconductor quantum dot (QD) have been actively developed. While the purity and indistinguishability of single photons are already close to ideal values, the high brightness of SPSs remains a challenge. The widely used resonant excitation with cross-polarization filtering usually leads to at least a two-fold reduction in the single-photon counts rate, since single-photon emission is usually unpolarized, or its polarization state is close to that of the exciting laser. One of the solutions is the use of polarization-selective microcavities, which allows one to redirect most of the QD emission to a specific polarization determined by the optical mode of the microcavity. In the present work, elliptical micropillars with distributed Bragg reflectors are investigated theoretically and experimentally as a promising design of such polarization-selective microcavities. The impact of ellipticity, ellipse area and verticality of the side walls on the splitting of the optical fundamental mode is investigated. The study of the near-field pattern allows us to detect the presence of higher-order optical modes, which are classified theoretically. The possibility of obtaining strongly polarized single-photon QD radiation associated with the short-wavelength fundamental cavity mode is shown.

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“…One of the main challenges to turn a promising material into a nanodevice is the local implementation of the desired physical parameters. Among several techniques, the most common procedures use either a mask which determines the regions of the modifiable areas [12,20,21] or use a well-focused beam that directly damage or alters the material properties in the irradiated section [22][23][24][25][26].…”

Section: Introductionmentioning

confidence: 99%

Laser irradiation effects in FeRh thin film

Merkel

Sájerman

Lenk

et al. 2023

Mater. Res. Express

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The effect of laser irradiation in the energy range from 20 mW to 200 mW was investigated in 109 nm thick Fe51Rh49 film deposited on an MgO (100) substrate. The initial, A1 structure with fully paramagnetic magnetic ordering was achieved after irradiating the samples with 120 keV Ne+ ions with a fluence of 1 × 1016 ion/cm2, as it was confirmed by conversion-electron Mössbauer spectroscopy. At higher powers physical damage of the layer was observed, while in the lowest power case, magnetic force microscopy revealed a well-defined magnetic structure reflecting the laser irradiation pattern. The presented results have the potential to be employed for laser ablation or allows the fabrication of arbitrary ferromagnetic pattern within a homogeneous paramagnetic FeRh thin films.

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GaAs manufacturing processes conditions for micro- and nanoscale devices

Cited by 9 publications

References 43 publications

Laser processing of micro/nano biomimetic structures

Laser processing of micro/nano biomimetic structures

Towards Bright Single-Photon Emission in Elliptical Micropillars

Laser irradiation effects in FeRh thin film

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