“…Owing to its slow growth rate, this technique can also be used to grow finely tuned, thin epilayers (>0:1 mm), which are used in laser diodes. Therefore, LPE is widely used for the growth of compound semiconductor layer structures for manufacturing optical devices, such as light-emitting diodes, 1) semiconductor lasers, 2) detectors, 3) and external modulators. 4) The successful operation of these devices strongly depends on the quality of the fabricated epitaxial layers.…”